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Method for preparing high-quality suspended two-dimensional material supporting membrane through clean transfer

A material thin-film, clean technology, applied in the field of clean transfer to prepare high-quality suspended two-dimensional material support film, can solve the problems of reducing graphene electrical, thermal, hydrophilic and other properties, graphene support film damage, unfavorable practical application and other problems , to achieve the effect of high integrity, low cost and high cleanliness

Active Publication Date: 2021-06-25
PEKING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The introduction of polymers will inevitably lead to serious pollution of impurities such as polymer residues on the surface of graphene, which reduces the electrical, thermal, and hydrophilic properties of graphene; in addition, polymer-assisted transfer technology to prepare graphene When the support film removes polymer residues on its surface, it is easy to cause further damage to the graphene support film and reduce its integrity, which is not conducive to practical application

Method used

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  • Method for preparing high-quality suspended two-dimensional material supporting membrane through clean transfer
  • Method for preparing high-quality suspended two-dimensional material supporting membrane through clean transfer
  • Method for preparing high-quality suspended two-dimensional material supporting membrane through clean transfer

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Experimental program
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Effect test

Embodiment 1

[0064] Embodiment 1, preparation of high-quality suspended graphene support film without glue transfer

[0065] The specific implementation process is as follows:

[0066] (1) A single-layer, double-layer, or few-layer graphene film was prepared on a copper foil substrate with a thickness of 25 μm by chemical vapor deposition. The graphene film can be prepared according to the method described in Chinese patent application 201811381142.1.

[0067] (2) Since graphene will grow on the upper and lower sides of the copper foil, the graphene film on one side is selected for use, and the graphene on the other side of the copper foil is removed with a plasma cleaner (Diener, Pico, Germany), with an air volume of 10 sccm and a power of 100W, processing time is 3 minutes.

[0068] (3) Add isopropanol dropwise on one side of the graphene, and make the isopropanol fully infiltrate the surface of the graphene film, the specific amount of isopropanol is per 1cm 2 Add 0.05-1 mL of graphen...

Embodiment 2

[0076] Embodiment 2, preparation of suspended boron nitride support film by transfer without glue

[0077] The specific implementation process is as follows:

[0078] (1) A single-layer boron nitride film was prepared on a copper foil substrate with a thickness of 25 μm by chemical vapor deposition. The boron nitride film was prepared by the method described in the literature Li Wang et.al.Nature 570,91-95 (2019) .

[0079] (2) Similarly, since the boron nitride film will grow on both sides of the copper foil, the boron nitride film on one side is selected, and the boron nitride on the other side of the copper foil is removed with a plasma cleaner (Diener, Pico, Germany). The gas volume is 10sccm, the power is 100W, and the processing time is 3 minutes.

[0080] (3) Add acetone dropwise on one side of the boron nitride, and make the acetone completely infiltrate the surface of the boron nitride film, the specific amount of acetone is per 1cm 2 Add 0.05-1 mL of graphene film...

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Abstract

The invention discloses a method for preparing a high-quality suspended two-dimensional material supporting membrane through clean transfer. According to the method, small organic molecules are used for modifying the surface of graphene, so that a graphene membrane can overcome the influence of liquid surface tension, and is kept complete on the liquid surface; The graphene on the liquid surface can be effectively attached to the porous substrate, so that the preparation of the high-integrity (greater than 90%) suspended graphene supporting membrane is realized; according to the method, no polymer needs to be introduced, the surface of the obtained suspended graphene membrane is clean, the cleanliness is equivalent to that of mechanically stripped graphene, and batch preparation of the clean suspended graphene supporting membrane can be achieved; the number of suspended graphene layers is controllable, and a single-layer, double-layer and few-layer (2-5 layers) suspended graphene supporting membrane can be prepared; and the suspended graphene supporting membrane can be directly used as a transmission electron microscope grid and is used for cryoelectron microscope sample preparation, high-resolution structure analysis of single particles and high-resolution imaging of nano particles and single atoms.

Description

technical field [0001] The invention relates to a method for preparing a high-quality suspended two-dimensional material support film by clean transfer. Background technique [0002] Suspended two-dimensional materials with atomic thickness, such as graphene support film, have good mechanical, electrical, thermal and other properties. Screening, gas capture and separation and other fields have great application prospects. At present, the preparation of suspended graphene-supported membranes with high integrity, uniform structure, and clean surface is still a huge challenge. [0003] At present, people usually use chemical vapor deposition technology to prepare high-quality graphene films on metal substrates, and the preparation of suspended graphene support films often requires the transfer of graphene films grown on metal substrates to porous substrates. In the graphene transfer process, it is necessary to remove or etch the metal substrate and transfer the graphene to th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B32/194C01B21/064
CPCC01B32/194C01B21/0648
Inventor 彭海琳郑黎明
Owner PEKING UNIV