Unlock instant, AI-driven research and patent intelligence for your innovation.

Terahertz metamaterial sensor and application thereof

A metamaterial and sensor technology, applied in the field of terahertz spectroscopy, can solve problems such as time-consuming, complicated operation, and generation of hazardous waste, and achieve the effects of reducing loss, improving sensing sensitivity, and facilitating detection

Pending Publication Date: 2021-07-20
UNIV OF SCI & TECH OF CHINA
View PDF0 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, these commonly used detection methods are usually time-consuming, complicated to operate, and have disadvantages such as generating hazardous waste.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Terahertz metamaterial sensor and application thereof
  • Terahertz metamaterial sensor and application thereof
  • Terahertz metamaterial sensor and application thereof

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0033] The present invention also provides a method for preparing the above-mentioned terahertz metamaterial sensor, including: preparing a flexible substrate; spin-coating photoresist on the flexible substrate, and then processing the designed mask pattern by using a photolithography process, and then depositing A thin layer of metal, and then remove the photoresist, to get a terahertz metamaterial sensor.

[0034] The flexible substrate of the metamaterial sensor provided by the present invention preferably adopts polyimide film, and the asymmetric ring structure adopts gold material, and its preparation process preferably specifically includes:

[0035] (1) Silicon substrate surface cleaning. In order to ensure that the surface of the silicon substrate is clean and the polyimide solution is firmly attached to the silicon wafer, the silicon surface must first be ultrasonically cleaned with acetone, alcohol, and deionized water.

[0036](2) spin coating polyimide solution. ...

Embodiment 1

[0046] 1. Preparation of metamaterial sensors

[0047] The flexible substrate of the metamaterial sensor designed in the present invention adopts polyimide film, and the periodic structure adopts gold material, and its preparation process includes: (1) cleaning the surface of the silicon substrate. In order to ensure that the surface of the silicon substrate is clean and the polyimide solution is firmly attached to the silicon wafer, the silicon surface must first be ultrasonically cleaned with acetone, alcohol, and deionized water. (2) spin coating polyimide solution. A 25 micron thick polyimide film was coated on a silicon wafer by spin coating. (3) Curing. In order to volatilize all the moisture in the polyimide solution and make the solution solidify and adhere to the silicon substrate, the spin-coated polyimide solution is placed in a vacuum oven for curing. (4) Remove the silicon substrate. The polyimide film is peeled off from the silicon substrate by utilizing the ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
radiusaaaaaaaaaa
Login to View More

Abstract

The invention provides a terahertz metamaterial sensor. The terahertz metamaterial sensor comprises unit structures, each unit structure comprises a flexible substrate and an asymmetric split ring structure arranged on the flexible substrate. Compared with the prior art, the terahertz metamaterial sensor provided by the invention adopts the flexible substrate, so that not only can the loss be reduced, but also the detection of a sample is facilitated. The asymmetric split ring structure is arranged on the flexible substrate, Fano resonance and electric dipole resonance can be generated at the same time, so that the flexible substrate has dual-band resonance frequency in a terahertz band, Fano resonance is a resonance mode with a high Q value, and two formants correspond to absorption peak positions of antibiotics in the terahertz band. Therefore, the sensing sensitivity of the sensor can be effectively improved through the coupling effect.

Description

technical field [0001] The invention belongs to the technical field of terahertz spectrum application, and in particular relates to a terahertz metamaterial sensor and its application. Background technique [0002] Terahertz spectrum is an electromagnetic wave between microwave and infrared, with a frequency range of 0.1-10THz and a wavelength range of 30μm-3mm. It is in the transitional stage from macroelectronics to microphotonics. Due to the lack of effective radiation sources and sensitive detection techniques in the past, this section of electromagnetic waves has not been studied in depth, so it is also called "terahertz gap". With the development of ultrafast optoelectronic technology and micro-semiconductor devices, more effective radiation sources and detection technologies have been provided for terahertz research, so terahertz technology has been extensively and deeply studied. Because the terahertz band contains physical, chemical and structural information about...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/3586G01N21/01
CPCG01N21/01G01N21/3586G01N2021/0112
Inventor 陆亚林殷明王建林杨萌萌马天黄浩亮黄秋萍傅正平
Owner UNIV OF SCI & TECH OF CHINA