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A silicon carbide dynamic detection equipment

A technology of dynamic detection and detection equipment, applied in the direction of measuring electricity, measuring devices, measuring electrical variables, etc., can solve problems such as the limitation of the number of samples to be detected, and achieve the effect of saving manpower, saving time and improving detection efficiency

Active Publication Date: 2021-11-02
陕西开尔文测控技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, although this equipment can change the original transistor tester from a low-efficiency detection of one sample to a continuous sample detection process, it still needs to rely on electrical components such as relays for the sample replacement process. When the number of electrical components is limited , the number of samples tested is also limited

Method used

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  • A silicon carbide dynamic detection equipment
  • A silicon carbide dynamic detection equipment
  • A silicon carbide dynamic detection equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] A silicon carbide dynamic detection device, including a detection device body 1, the detection device body 1 is used to generate different currents, voltages, pulse signals, etc., for testing the electrical performance of a silicon carbide device 101, for example, the detection device body 1 can use The KEW6400 power device dynamic and static test integrated machine of our company (Shaanxi Kelvin Measurement and Control Technology Co., Ltd.) can also use the bronze sword pulse signal generator IGBT to test the SiC test power device PSG-06. The silicon carbide testing equipment in the prior art generally has wiring ports. By connecting different interface ports of the silicon carbide device 101 to different wiring ports of the testing equipment, the pulse signals generated by the testing equipment are transmitted to the testing silicon carbide device 101, and then tested The device is reflecting the test results according to the test situation. The present invention deve...

Embodiment 2

[0046] A silicon carbide dynamic detection device, the structure of which is basically the same as that of Embodiment 1, the difference is that this embodiment does not have a crash pad structure, and the sample transfer device 5 does not use mechanical claws, but adopts the following structure:

[0047] see Figure 2-6 , the sample transfer device 5 of the present embodiment includes an eccentric wheel 51, a non-eccentric transfer wheel 52, a conveyor belt 53, a sample holder 54, a sample unlocking member 55 and a rotating motor; the rotation shafts of the eccentric wheel 51 and the transfer wheel 52 are connected in The inner wall of the housing 3, or the rotation shafts of the eccentric wheel 51 and the transmission wheel 52 are connected to the column 31 provided in the housing 3, the sample storage box 4 and the sample collection box 6 are installed in the housing 3, and the controller is installed on the inner wall of the housing 3; The sample transfer device 5 is instal...

Embodiment 3

[0053] A silicon carbide dynamic detection device, the structure of which is basically the same as that of Embodiment 2, the difference is that

[0054] see Figure 7-8 , in this embodiment, the sample holder 54 includes an insulating clamping arm 541 disposed on the conveyor belt 53, and each clamping arm 541 is provided with an inclined edge 5411 on a surface away from the silicon carbide device 101, and the inclined edge 5411 is semiconical in shape Or less than the shape of a semi-circular frustum, its side near the conveyor belt 53 is a plane, and does not contact the conveyor belt 53. Since the present invention is provided with the eccentric wheel 51, during its rotation and during the movement of the inclined edge 5411, the inclined edge 5411 is subjected to The slanted edge 5411 is blocked by the slanting rod 551 and moves away from the silicon carbide device 101. The more the moving distance, the greater the blocking force. The inclined edge 5411 is blocked by the sl...

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Abstract

The invention belongs to the technical field of semiconductor testing equipment, and in particular relates to a silicon carbide dynamic testing equipment. The equipment includes a testing equipment main body and a sample feeding device. The wire connected to the port of the silicon device and the wiring port of the main body of the detection equipment, one end of the wire used to be inserted into the port adopts a conductive metal column, and the top of the shell is provided with a piercing port; the shell is provided with a sample storage box, a sample A transfer device, a sample collection box and a controller, the sample transfer device is located between the conductive metal column and the sample storage box, the sample transfer device is used to transfer the silicon carbide device to a suitable position. The invention develops a continuously detectable sampling device used in conjunction with silicon carbide testing equipment, which can continuously test all silicon carbide devices to be tested, which greatly improves the speed and saves manpower compared with the traditional device-by-device testing process.

Description

technical field [0001] The invention belongs to the technical field of semiconductor testing equipment, and in particular relates to a silicon carbide dynamic testing equipment. Background technique [0002] Semiconductor devices such as IGBT, silicon carbide, etc. are used in many devices. The most common silicon carbide semiconductor device is a transistor. Silicon carbide transistors have high blocking voltage, reduced conduction voltage, short turn-off time and high temperature resistance. It has a very large advantage in the application of power electronic devices. In silicon carbide, SiC BJT has more unique advantages, such as close turn-off time to SiC MOSFET, and does not require complex gate oxide process. Although SiC BJT has unique advantages, as a flow-controlled device, it needs a continuous base current supply when the device is working, which requires the stable performance of all functions of the device. [0003] In the existing technology, in order to impr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/26G01R1/04G01R1/02B65G47/84B65G17/12B65G17/32B65G59/02B65G65/32B65G23/22B65G43/00
CPCB65G17/123B65G17/32B65G23/22B65G43/00B65G47/842B65G59/026B65G65/32G01R1/02G01R1/0408G01R31/2601
Inventor 杜浩晨
Owner 陕西开尔文测控技术有限公司
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