The invention belongs to the technical field of
semiconductor detection equipment, and particularly relates to
silicon carbide dynamic detection equipment which comprises a detection equipment main body and a sample
introduction device, the sample
introduction device comprises a vertical frame and a shell, a wire connected with a
silicon carbide device port and a wiring port of the detection equipment main body is laid on the vertical frame, and the shell is connected with the
silicon carbide device port. One end of the wire, which is used for being inserted into the port, adopts a conductive
metal column; a penetrating port is formed in the top of the shell; and a sample storage box, a sample conveying device, a
sample collection box and a controller are arranged in the shell, the sample conveying device is located between the conductive
metal column and the sample storage box, and the sample conveying device is used for conveying a
silicon carbide device to a proper position. The
silicon carbide dynamic detection equipment develops a sample
introduction device which is matched with
silicon carbide detection equipment and can be used for continuous detection, all silicon carbide devices to be detected can be continuously tested, and compared with the traditional process of testing the devices one by one, the speed is greatly improved, and the manpower is saved.