Optical lens detection system and detection method

Abstract

The invention belongs to the technical field of optical detection, and provides an optical lens detection system and method. A spherical wave emitted by an interferometer is focused on a first focus through an interferometer lens, a spectroscope is arranged on a light emitting path of the interferometer and is used for reflecting a beam of light reflected by a to-be-detected lens into the interferometer according to an original light emitting path. The formed interference fringes are used for guiding finish machining of the to-be-detected mirror; the other light beam is converged at a second focus after penetrating through the spectroscope; the Ronchi grating is arranged in a transmission light path of the spectroscope and does not coincide with the position of the second focal point; and the light beam modulated by the Ronchi grating enters the imaging lens group to form Ronchi grating stripes for detecting rough machining defects of the surface type of the to-be-detected lens. The Ronchi grating and the interferometer can be adopted in the same light path for detection at the same time, rough machining in the machining process can be detected, the fine polishing process can also be detected, and the detection results of the Ronchi grating and the interferometer can be compared and corrected in real time.

Description

technical field [0001] The invention belongs to the technical field of optical detection, and in particular relates to a spherical or aspheric mirror detection system and detection method combined with a Ronchi grating and an interferometer. Background technique [0002] Large-diameter aspheric mirrors are widely used in aerospace, astronomical observation, shooting range measurement and other fields. At present, the diameter of large-diameter aspheric mirrors is getting larger and larger, and the requirements for processing and testing of large-diameter aspheric mirrors are also getting higher and higher. The processing of aspheric mirrors includes steps such as rough processing and fine polishing, and the inspection of the processing process also needs to be followed up in real time. [0003] At present, the main detection methods for large-aperture aspheric mirrors include the three-coordinate method, the Hardman method, the CGH method, and the interferometer method. The...

AI Technical Summary

Problems solved by technology

The three-coordinate detection has certain restrictions on the caliber of the lens, and it takes a long time. The CGH method is greatly affected by the process accuracy. The Hardman and interferometer detection accuracy is high, but the measurement range is small. In the rough processing stage, the surface shape is rough. Large degree, hardman and interferometer detection is more difficult

The Ronchi grating detection method can realize the detection from fine grinding to initial polishing by adjusting the frequency of the grating, which is suitable for the guidance detection of the rough machining process, but it is difficult to quantitatively test the surface parameters in the later stage of fine polishing, requiring an interferometer take measurements

Rough machining and fine machining require two sets of testing equipment. To replace the testing equipment, sometimes it is necessary to move the inspected mirror to a specific inspection area, which is time-consuming, laborious and risky

Replacing the detection equipment requires realigning the optical axis, which is a time-consuming process

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