Single-layer or several-single-layer CrTe3 film and preparation method thereof
A thin-film and single-layer technology, applied in the direction of metal selenide/telluride, binary selenium/telluride compounds, etc., can solve the problems of high preparation difficulty and limited purity of bulk materials
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Embodiment 1
[0056] The specific implementation steps are as follows:
[0057] Step 1: Select high-purity Cr and Te element powders, that is, use Cr with a purity of 99.9999% and Te powder with a purity of 99.9999%, and load them into the K-cell evaporation source respectively.
[0058] Step 2: Insert the Cr and Te sources into the vacuum cavity, and pump the vacuum until the vacuum degree reaches 3.0×10 -6 Pa, in order to increase the vacuum degree, wrap the heating tape on the whole preparation cavity, and bake it to 150°C for 3 days, so that the vacuum on the back can reach 3.0×10 -8 Pa, after the baking is over, degas the Cr and Te sources separately, slowly heat the Te source to 340°C, degas until the Te source is heated to 340°C, and the vacuum degree is less than 1.0×10 -7 Pa. After the end, the Cr source is degassed, and the Cr source is slowly heated to 950°C for degassing. During the process, the vacuum degree of the preparation chamber is kept below 1.0×10 -7 Pa, when the tem...
Embodiment 2
[0065] The specific implementation steps are as follows:
[0066] Step 1: Select high-purity Cr rods and Te element powders, that is, Cr rods with a purity of 99.9999% and Te powders with a purity of 99.9999%, and put them into the electron beam evaporation source and the K-cell evaporation source respectively.
[0067] Step 2: Insert the Cr and Te sources into the vacuum cavity, and pump the vacuum until the vacuum degree reaches 3.0×10 -6 Pa, in order to increase the vacuum degree, wrap the heating tape on the whole preparation cavity, and bake it to 150°C for 3 days, so that the vacuum on the back can reach 3.0×10 -8 Pa, after the baking is over, degas the Cr and Te sources separately, slowly heat the Te source to 340°C, degas until the Te source is heated to 340°C, and the vacuum degree is less than 1.0×10 -7 Pa. After the end, the Cr source is degassed, and the Cr source is slowly heated to 950°C for degassing. During the process, the vacuum degree of the preparation ch...
Embodiment 3
[0074] The specific implementation steps are as follows:
[0075] Step 1: Select high-purity Cr rods and Te element powders, that is, Cr rods with a purity of 99.9999% and Te powders with a purity of 99.9999%, and put them into the electron beam evaporation source and the K-cell evaporation source respectively.
[0076]Step 2: Insert the Cr and Te sources into the vacuum cavity, and pump the vacuum until the vacuum degree reaches 3.0×10 -6 Pa, in order to increase the vacuum degree, the whole preparation cavity can be wrapped with a heating tape, and baked to 150°C for 3 days, so that the vacuum on the back can reach 3.0×10 -8 Pa, after the baking is over, degas the Cr and Te sources separately, slowly heat the Te source to 340°C, degas until the Te source is heated to 340°C, and the vacuum degree is less than 1.0×10 -7 Pa. After the end, the Cr source is degassed, and the Cr source is slowly heated to 950°C for degassing. During the process, the vacuum degree of the prepara...
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