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Optical fiber polymer microcavity pressure sensor and preparation method thereof

A pressure sensor and polymer technology, which is applied to the measurement of fluid pressure using optical methods, the measurement of fluid pressure, and the measurement of force by measuring the change of optical properties of materials when they are stressed. , The film thickness repeatability is difficult to guarantee, the process is complicated, etc.

Active Publication Date: 2021-08-27
JINAN UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the manufacture of the optical fiber Fabry-Perot sensor structure in the prior art involves transferring a membrane with a thickness of micron or even nanometer to the tiny optical fiber end face. It is also difficult to ensure the repeatability of parameters such as film thickness and film thickness. A fiber optic polymer microcavity pressure sensor and its preparation method are provided.

Method used

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  • Optical fiber polymer microcavity pressure sensor and preparation method thereof
  • Optical fiber polymer microcavity pressure sensor and preparation method thereof
  • Optical fiber polymer microcavity pressure sensor and preparation method thereof

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Embodiment 1

[0035] like Figure 5 As shown, this embodiment discloses a fiber optic polymer microcavity pressure sensor, the polymer microcavity pressure sensor includes an optical fiber 1 and a hollow cylindrical structure 5, and the optical fiber 1 and the hollow cylindrical structure 5 are fused to form a fiber-hollow cylindrical structure microstructure , the end surface of one end of the optical fiber 1 is provided with a depression, and a micro-air cavity 2 is arranged between the depression and the air. 4. The polymer film is formed by curing, and the interface between the end face of the optical fiber 1 and the polymer film respectively constitutes two reflection surfaces of the Fabry-Perot cavity.

[0036] In this embodiment, the end face of the optical fiber-hollow cylindrical structure microstructure is coated with a gold film.

[0037] In this embodiment, the optical fiber 1 is coated with a light-absorbing medium on the end surface of the end with a recess for absorbing ligh...

Embodiment 2

[0041] like Image 6 As shown, this embodiment discloses a preparation method of a fiber optic polymer microcavity pressure sensor, figure 1 , figure 2 , image 3 and Figure 4 Respectively are the structural diagrams corresponding to each step in the preparation process of the fiber-optic polymer microcavity pressure sensor.

[0042] The preparation method of the optical fiber polymer microcavity pressure sensor disclosed in the above embodiments, the process is as follows:

[0043] S1. Fusing the optical fiber 1 and the hollow cylindrical structure 5 to form an optical fiber-hollow cylindrical structure microstructure;

[0044] S2, processing a depression on the end surface of one end of the optical fiber 1;

[0045] In this embodiment, the specific process of processing the depression on the end face of one end of the optical fiber 1 is as follows: chemical etching or laser etching of the end face of the optical fiber; or, fixing a hollow cylindrical structure on the ...

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Abstract

The invention discloses an optical fiber polymer microcavity pressure sensor and a preparation method. The end face of one end of an optical fiber in the optical fiber polymer microcavity pressure sensor is provided with a recess, a micro air cavity is arranged between the recess and air, heating laser is injected into the end face of the optical fiber provided with the recess from the other end of the optical fiber, and ultraviolet glue is dripped on the end face of the recess. According to the preparation method of the optical fiber polymer microcavity pressure sensor, geometric parameters of the ultraviolet glue on the end face of the optical fiber are changed by heating laser, the thickness of the ultraviolet glue and the length of the micro air cavity can be flexibly controlled, the pressure sensitive characteristic of the sensor is regulated and controlled, the performance and applicability of the sensor are improved, and the requirements of different application occasions on pressure, sound wave and ultrasonic wave detection can be met.

Description

technical field [0001] The invention relates to the technical field of optical fiber pressure sensors, in particular to an optical fiber polymer microcavity pressure sensor and a preparation method. Background technique [0002] Optical fiber pressure sensing uses light as the carrier and optical fiber as the medium to sense and transmit external pressure signals. It has the advantages of small size, light weight, strong electrical insulation, and anti-electromagnetic interference. At the same time, the sensor can withstand extreme conditions such as high temperature, high pressure, strong shock and vibration, and can be used for pressure detection in flammable, explosive, high temperature and high pressure environments. [0003] Optical fiber Fabry-Perot sensor is a new type of sensor. By making two high-reflection film layers in the optical fiber, an F-P cavity with a certain size is formed. When the light beam passes through the F-P cavity, multiple transmission and refle...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/24G01L11/02B05D7/24B05D3/00B05D3/06
CPCG01L1/242G01L11/025B05D7/24B05D3/007B05D3/067
Inventor 马军范恩菠关柏鸥
Owner JINAN UNIVERSITY
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