Optical fiber polymer microcavity pressure sensor and preparation method thereof
A pressure sensor and polymer technology, which is applied to the measurement of fluid pressure using optical methods, the measurement of fluid pressure, and the measurement of force by measuring the change of optical properties of materials when they are stressed. , The film thickness repeatability is difficult to guarantee, the process is complicated, etc.
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Embodiment 1
[0035] like Figure 5 As shown, this embodiment discloses a fiber optic polymer microcavity pressure sensor, the polymer microcavity pressure sensor includes an optical fiber 1 and a hollow cylindrical structure 5, and the optical fiber 1 and the hollow cylindrical structure 5 are fused to form a fiber-hollow cylindrical structure microstructure , the end surface of one end of the optical fiber 1 is provided with a depression, and a micro-air cavity 2 is arranged between the depression and the air. 4. The polymer film is formed by curing, and the interface between the end face of the optical fiber 1 and the polymer film respectively constitutes two reflection surfaces of the Fabry-Perot cavity.
[0036] In this embodiment, the end face of the optical fiber-hollow cylindrical structure microstructure is coated with a gold film.
[0037] In this embodiment, the optical fiber 1 is coated with a light-absorbing medium on the end surface of the end with a recess for absorbing ligh...
Embodiment 2
[0041] like Image 6 As shown, this embodiment discloses a preparation method of a fiber optic polymer microcavity pressure sensor, figure 1 , figure 2 , image 3 and Figure 4 Respectively are the structural diagrams corresponding to each step in the preparation process of the fiber-optic polymer microcavity pressure sensor.
[0042] The preparation method of the optical fiber polymer microcavity pressure sensor disclosed in the above embodiments, the process is as follows:
[0043] S1. Fusing the optical fiber 1 and the hollow cylindrical structure 5 to form an optical fiber-hollow cylindrical structure microstructure;
[0044] S2, processing a depression on the end surface of one end of the optical fiber 1;
[0045] In this embodiment, the specific process of processing the depression on the end face of one end of the optical fiber 1 is as follows: chemical etching or laser etching of the end face of the optical fiber; or, fixing a hollow cylindrical structure on the ...
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Abstract
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