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Stepped piezoelectric energy collector based on laser surface thinning and preparation method

A piezoelectric energy, stepped technology, applied to piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., can solve problems such as poor matching performance, and achieve high precision and reliability Strong controllability and high output power

Inactive Publication Date: 2021-08-27
SHANGHAI INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The object of the present invention is to provide a stepped piezoelectric energy harvester based on laser surface thinning and its preparation method, which is used to solve the poor matching performance between the existing piezoelectric energy harvester and the resonant frequency in the natural environment, thereby Problems leading to energy productivity efficiency

Method used

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  • Stepped piezoelectric energy collector based on laser surface thinning and preparation method
  • Stepped piezoelectric energy collector based on laser surface thinning and preparation method
  • Stepped piezoelectric energy collector based on laser surface thinning and preparation method

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preparation example Construction

[0037] A method for preparing a stepped piezoelectric energy harvester based on laser surface thinning, comprising the following steps:

[0038] 1) Select the metal substrate 21, and perform 1-5min ultrasonic cleaning and 5-10min drying treatment on the metal substrate 21;

[0039] 2) Select the piezoelectric substrate 11, and screen-print a 2-8 μm adhesive material on the lower side of the piezoelectric substrate 11 and the upper side of the metal substrate 21, apply a clamping pressure of 0.1-1 MPa for clamping with a clamp, and place 50-200 ℃, vacuum degree of 60-90% in a vacuum oven for 4-6 hours to carry out thermocompression bonding to obtain the piezoelectric base layer 12, adhesive layer 3 and metal base layer 22 arranged in sequence from top to bottom, take it out and cool To room temperature, the cantilever beam blank is obtained;

[0040] 3) Fix the cantilever beam blank on the laser platform, and make the piezoelectric base layer 12 on the upper side, then set the...

Embodiment 1

[0050] A stepped piezoelectric energy harvester based on laser surface thinning, including a cantilever beam, and fixing devices and mass blocks 4 arranged at both ends of the cantilever beam, wherein the structure of the cantilever beam is as follows figure 1 The shown includes a bonding layer 3 and a piezoelectric layer 1 and a metal substrate layer 2 symmetrically arranged on both sides of the bonding layer 3, and along the length direction of the cantilever beam pointing to the proof mass 4, the piezoelectric layer 1 and the metal substrate layer 2 The thickness decreases gradually in a step-like manner.

[0051] Specifically, the stepped structure on the piezoelectric layer 1 includes a first piezoelectric stepped layer 101, a second piezoelectric stepped layer 102, and a third piezoelectric stepped layer 103 with successively decreasing thicknesses, and the stepped structure on the metal substrate layer 2 The structure includes a first stepped substrate layer 201, a seco...

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Abstract

The invention relates to a stepped piezoelectric energy collector based on laser surface thinning and a preparation method, the stepped piezoelectric energy collector comprises a cantilever beam, and a fixing device and a mass block which are arranged at two ends of the cantilever beam, the cantilever beam comprises a piezoelectric layer, a bonding layer and a metal substrate layer which are sequentially arranged from top to bottom, and the thicknesses of the piezoelectric layer and the metal substrate layer are gradually reduced in a stepped manner along the length direction of the cantilever beam pointing to the mass block. Compared with the prior art, the stepped thinning process is carried out through laser equipment, stress is released on a traditional rectangular cantilever beam, the low-frequency, high-output and high-energy-density stepped piezoelectric energy collection device is obtained, and the piezoelectric energy collection device has the advantages of being simple in preparation method, high in controllability, good in compatibility and the like; and the prepared stepped cantilever beam has the advantages of high energy density, low resonant frequency, high output electric energy and the like, and has a relatively wide application prospect.

Description

technical field [0001] The invention belongs to the technical field of bulk piezoelectric material thinning and piezoelectric energy harvesters, and relates to a stepped piezoelectric energy harvester based on laser surface thinning and a preparation method. Background technique [0002] In the thin film field of micro-piezoelectric energy harvester devices, the thickness of the piezoelectric layer in micro-electromechanical systems (MEMS) devices is concentrated in the scale range of 100nm-1mm, which is mainly divided into thin film, thick film and bulk piezoelectric ceramics (PZT ) three categories. Bulk PZT (100μm-1mm) is generally obtained by sintering at a high temperature above 1000°C, which can obtain good piezoelectric properties, but the process is complex and requires high equipment; PZT thin films (100nm-1um) are generally obtained by molecular beam epitaxy (MBE), Pulsed laser deposition (PLD) and chemical vapor deposition (CVD) and other processes, however, the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/18
CPCH02N2/188
Inventor 李以贵王保志张成功董璇王欢
Owner SHANGHAI INST OF TECH
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