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Optical fiber probe and assembling method thereof

An optical fiber probe and assembly method technology, applied in scanning probe technology, scanning probe microscopy, measuring devices, etc., can solve the problems of atomic force probe surface structure damage, inability to use optical measurement, inability to use light guide and other problems

Pending Publication Date: 2021-09-10
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The traditional preparation methods of large aspect ratio probes need to destroy the AFM probe (such as pore growth method) or corrode and lead to the destruction of the surface structure of the AFM probe (such as solution-based growth method and assembly method). These methods are only applicable to ordinary AFM probes. Probe-bound one-dimensional nanomaterials
For fiber-optic large-aspect-ratio probes that require smooth probe surface light guidance and precise positioning of one-dimensional nanomaterials with large aspect ratios, if assembled according to the existing traditional preparation method of large-aspect-ratio probes, the fiber optic probe The surface of the surface will be damaged, it cannot be used to guide light, and thus cannot be used for optical measurements

Method used

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  • Optical fiber probe and assembling method thereof
  • Optical fiber probe and assembling method thereof

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Experimental program
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Effect test

Embodiment 1

[0048] The assembly method of the fiber optic probe in this embodiment includes the following steps:

[0049] (1) the tapered optical fiber probe 2 coated with the metal film layer is fixed on the side wall of the pin of the quartz tuning fork resonant sensor, and the other pin of the quartz tuning fork resonant sensor is clamped by the nano manipulator 3;

[0050] (2) Place the dispersed one-dimensional nanomaterials on the slide glass 6, and fix the slide glass 6 to the metal stage 7 with conductive glue;

[0051] (3) Place the nano-manipulator 3 and the metal stage 7 in the vacuum chamber 1 of the scanning electron microscope, and control the nano-manipulator 3 under the observation of the electron microscope, so that the tapered fiber optic probe 2 on the quartz tuning fork approaches and absorbs One-dimensional nanomaterials on the metal stage 7;

[0052] (4) Using electron beams to induce deposition of a layer of metal to fix the one-dimensional nanomaterials at the tip...

Embodiment 2

[0055] This embodiment provides a method for assembling an optical fiber probe with a large aspect ratio, such as figure 1 So, include the following steps:

[0056] (1) Fix the tapered fiber optic probe 2 plated with an 80nm thick gold film layer on the side wall of the 4 pins of the quartz tuning fork resonant sensor, and use the nano-manipulator to clamp the other pin of the quartz tuning fork, wherein the tapered fiber optic probe 2 The probe cone angle is 30°, and the cone tip diameter is 50nm;

[0057] (2) The dispersed carbon nanotubes 5 are placed on the glass slide 6, and the glass slide 6 is fixed on the metal stage 7 with conductive glue;

[0058] (3) Place the nanomanipulator 3 and the metal stage 7 in the vacuum chamber 1 of the scanning electron microscope, first find a carbon nanotube 5 with a diameter of 10nm and a length > 100nm under the electron microscope, and then control the nanomanipulator 3 , making the fiber optic probe 2 on the quartz tuning fork app...

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Abstract

The invention discloses an optical fiber probe and an assembling method thereof. The optical fiber probe comprises a conical optical fiber probe body and a one-dimensional nano material; one end of the one-dimensional nano material is connected with the tip end of the conical optical fiber probe body through a metal layer, the conical optical fiber probe body and the one-dimensional nano material are coaxial, the one-dimensional nano material adopts nanowires or nanotubes, and the length-diameter ratio is not less than 10:1. The assembling method comprises the following steps: the tip end of the conical optical fiber probe body is in contact with one end of the one-dimensional nano material; a layer of metal is induced and deposited at the contact part of the conical optical fiber probe body and the one-dimensional nano material by using an electron beam deposition method, and the deposited metal layer fixes the one-dimensional nano material at the tip end position of the conical optical fiber probe body; and modification processing is carried out on the deposited metal layer by using a micro-nano processing method to obtain the optical fiber probe. According to the optical fiber probe, the surface of the probe is not damaged and is smooth, and the defects caused by the fact that the surface of the probe is damaged and the surface is rough when the optical fiber probe is assembled in the prior art can be avoided.

Description

technical field [0001] The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to an optical fiber probe and an assembly method thereof. Background technique [0002] The realization of military equipment functions such as micro-spacecraft control and inertial guidance devices, and aircraft stealth depends on the special functions of high-precision and complex micro-nano structures. The characteristic size is generally at the nanometer level (<50nm), and the depth may reach the micron level. For complex micro-nano structures, especially high-aspect-ratio micro-nano structures, it is difficult to perform accurate three-dimensional structure measurement to guide precise processing and ensure the effectiveness of their functional applications. [0003] At present, in the field of nanometer measurement, high-end microscopes such as scanning probe microscopes are still used as the main measuring instruments, in which the size and sha...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/22B82Y30/00B82Y40/00
CPCG01Q60/22B82Y30/00B82Y40/00
Inventor 杨树明李少博王飞程碧瑶张国锋
Owner XI AN JIAOTONG UNIV