Check patentability & draft patents in minutes with Patsnap Eureka AI!

Method for preparing crystal film through ion beam enhanced corrosion

An ion beam enhancement and crystal technology, applied in phonon exciters, active medium materials, laser parts, etc., can solve the problems of complex process, high cost, and long time for growing crystal thin films.

Active Publication Date: 2021-09-10
SHANDONG UNIV
View PDF17 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this method obtains crystal thin films, it takes a long time to grow crystal thin films, the process is complicated, and the cost is high.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for preparing crystal film through ion beam enhanced corrosion
  • Method for preparing crystal film through ion beam enhanced corrosion

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] A method based on carbon ion beam irradiation enhanced corrosion Yb:YAG crystal film stripping, comprising steps as follows:

[0036] (1) polishing and cleaning the cut Yb:YAG crystal 3;

[0037] (2) The energy emitted by the ion accelerator is 6 Mev, and the dose is 2×10 15 ions / cm2 of carbon ions 1 bombards the polished surface of Yb:YAG crystal, forming a defect layer 2 that is easily corroded below the directly bombarded polished surface;

[0038] (3) the Yb:YAG crystal bombarded by the above ions is cut with a diamond cutter 4, and the bombardment surface is cut to obtain a groove 6 with a depth of 25-50 μm and a width of 100-200 μm; the interval between the two grooves is 20-200 μm, a ridge-shaped protrusion 5 with a width of 20-200 μm is formed between the two grooves, exposing the defect layer;

[0039] (4) 98% concentrated phosphoric acid is mixed with deionized water at a volume ratio of 4:1 to obtain an acid solution 8, which is injected into the quartz ves...

Embodiment 2

[0043] A method based on carbon ion beam irradiation enhanced corrosion Nd:YAG crystal film stripping, comprising steps as follows:

[0044] (1) Polishing and cleaning the cut Nd:YAG crystal 3;

[0045] (2) The energy emitted by the ion accelerator is 6 Mev, and the dose is 2×10 15 ions / cm2 of carbon ions 1 bombard the polished surface of Nd:YAG crystal, forming a defect layer 2 that is easily corroded below the directly bombarded polished surface;

[0046](3) The Nd:YAG crystal bombarded by the above ions is cut with a diamond cutter 4, and the bombardment surface is cut to obtain a groove 6 with a depth of 25-50 μm and a width of 100-200 μm; the interval between the two grooves is 20-200 μm, a ridge-shaped protrusion 5 with a width of 20-200 μm is formed between the two grooves, exposing the surface defect layer;

[0047] (4) 98% concentrated phosphoric acid is mixed with deionized water at a volume ratio of 4:1 to obtain an acid solution 8, and the acid solution 8 is inje...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
depthaaaaaaaaaa
widthaaaaaaaaaa
Login to View More

Abstract

The invention relates to a method for preparing a crystal film through ion beam enhanced corrosion. The method is carried out by adopting a heavy ion beam carbon ion combined chemical corrosion method, and is characterized in that a defect layer is manufactured for a crystal material by utilizing an ion irradiation technology, a diamond cutter is used for cutting an irradiated crystal surface to prepare a groove, and the defect layer is further exposed to increase the contact area with an acid solution, and is corroded by using a chemical corrosion technology, so that stripping of the large-area micron-scale thickness crystal film is realized, rapid preparation of the crystal film is realized, the time is short, the process is simple, the cost is low, and large-scale popularization and application are easy.

Description

technical field [0001] The invention relates to a method for preparing a crystal thin film by ion beam enhanced corrosion, and belongs to the technical field of integrated optical devices. Background technique [0002] Ion beam technology changes the properties of materials by controlling the type of irradiated elements, irradiated energy, and irradiated dose. Since its appearance, this technology has been widely used in many fields such as material modification, micro-nano processing, and biomedicine. Has broad development prospects. Lasers are divided into four categories: solid-state lasers, gas lasers, semiconductor lasers, and dye lasers. The commonly used working medium for solid-state lasers is laser crystals. For example: a laser doped with trivalent neodymium ions (Nd: YAG) in yttrium aluminum garnet crystal can emit near-infrared laser light with a wavelength of 1050nm. In addition, calcium oxygadolinium borate GdCOB is considered to be an ideal candidate materia...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/16B24B1/00
CPCH01S3/1641H01S3/163B24B1/00
Inventor 谭杨李慧琦陈峰
Owner SHANDONG UNIV
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com