Organic-inorganic hybrid integrated polymer temperature sensor and preparation method thereof

Abstract

The invention discloses an organic-inorganic hybrid integrated polymer temperature sensor and a preparation method thereof, and belongs to the technical field of polymer optical waveguide temperature sensors. The organic-inorganic hybrid integrated polymer temperature sensor is composed of a silicon substrate, a silicon dioxide lower cladding layer prepared on the silicon substrate, a germanium-doped silicon dioxide core layer waveguide prepared on the silicon dioxide lower cladding layer, a boron and phosphorus-doped silicon dioxide upper cladding layer prepared on the silicon dioxide lower cladding layer, apolymer core layer waveguide prepared on the boron and phosphorus-doped silicon dioxide upper cladding layer, and apolymer cladding prepared on the silicon dioxide upper cladding doped with boron and phosphorus and the polymer core layer waveguide. When the temperature changes, the thermo-optical coefficient of the silicon dioxide is positive, the thermo-optical coefficient of the polymer is negative, the refractive index of the silicon dioxide core layer is increased, the refractive index of the polymer core layer is reduced, the change of the refractive index enables the original phase difference to further change, and the position of the resonance peak is changed. The temperature change is represented by calculating the wavelength shift of the harmonic peak, so that the temperature sensing function is realized.

Description

technical field [0001] The invention belongs to the technical field of polymer optical waveguide temperature sensors, in particular to a polymer temperature sensor with an organic / inorganic hybrid integrated asymmetric Mach-Zehnder Interferometer (Asymmetric Mach-Zehnder Interferometer, AMZI) structure and a preparation method thereof. Background technique [0002] Temperature measurement plays an important role in various fields such as industrial manufacturing, medical equipment, life science, military industry and even our daily life. At present, temperature sensors are developing rapidly towards high reliability, safety, higher precision, bus standardization, and more functions. Among them, due to the advantages of high sensitivity, anti-electromagnetic interference, and wide detection bandwidth, optical temperature sensors have been extensively researched by domestic and foreign scholars in recent years and developed into commercial products. Compared with optical fibe...

AI Technical Summary

Problems solved by technology

However, the thermo-optic coefficient of silicon dioxide is only +1.19×10-5K-1, and the sensitivity of the prepared temperature sensor is very low

Images