Indium compound and method for forming indium-containing film using said indium compound
A film forming method and compound technology, applied in the field of indium compounds, can solve problems such as uncomfortable low pressure and the like
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Embodiment 1
[0154] s Synthesis of BuCp)>
[0155] 300 mL of dehydrated pentane and 27.8 g (0.22 mol, 1.1 equivalent) of s-butylcyclopentadiene were added to a 1 L flask. At room temperature (temperature is 20° C.), 131 mL (0.21 mol, 1 equivalent) of 1.6 M n-butyllithium solution was added dropwise. The obtained reaction mixture was stirred with a magnetic stirrer for 3 hours, and then the solvent was distilled off under reduced pressure to obtain a white solid.
[0156] The white solid was suspended in 500 mL of dehydrated diethyl ether, 31.6 g (0.21 mol, 1 equivalent) of InCl was added, and after stirring overnight at room temperature, the yellow filtrate was separated by filtration.
[0157] The obtained filtrate was distilled off the solvent under reduced pressure to obtain a yellow liquid. The obtained liquid is introduced into a simple distillation device to obtain a fraction at a temperature of 40°C to 45°C and a pressure of 5Pa, i.e. a pale yellow liquid. The yield is 45.3g (0.19...
Embodiment 2
[0163] s Synthesis of PenCp)>
[0164] Add 9.5g (0.067mol, 1.0 equivalent) of Li ( s PenCp) and 200 mL of ether after dehydration. After adding 10.1 g (0.067 mol, 1 equivalent) of InCl and stirring overnight at room temperature, the yellow filtrate was separated by filtration. The obtained filtrate was distilled off the solvent under reduced pressure to obtain a yellow liquid. The obtained liquid was introduced into a simple distillation device to obtain a fraction at a temperature of 70°C to 80°C and a pressure of 5 Pa, i.e. a pale yellow liquid. The yield was 13.8g (0.055mol), and the yield was 83% (based on InCl). The obtained pale yellow liquid was liquid at storage temperature, room temperature 23°C.
[0165] The obtained In( s PenCp) for analysis. Using C in a deuterated solvent 6 D. 6 Conducted 1 H-NMR measurement confirmed that In( s structure of PenCp). 1 H-NMR (δ, C 6 D. 6 , 400MHz, 25°C): 5.92(t, 2H, Cp-H), 5.81(t, 2H, Cp-H), 2.57(m, 1H, Cp-CH-), 1.60-1....
Embodiment 3
[0169]
[0170] 400 mL of dehydrated pentane and 23.2 g (0.18 mol, 1.1 equivalent) of isopentylcyclopentadiene were added to a 1 L flask. At room temperature (temperature is 20° C.), 104 mL (0.17 mol, 1 equivalent) of 1.6 M n-butyllithium solution was added dropwise. The obtained reaction mixture was stirred with a magnetic stirrer for 3 hours, and then the solvent was distilled off under reduced pressure to obtain a white solid.
[0171] The white solid was suspended in 500 mL of dehydrated diethyl ether, 25.1 g (0.17 mol, 1 equivalent) of InCl was added, and after stirring overnight at room temperature, the yellow filtrate was separated by filtration.
[0172]The solvent was distilled off from the obtained filtrate under reduced pressure to obtain a pale yellow solid. The obtained solid was introduced into a simple distillation device, and the distillate at a temperature of 60°C to 65°C and a pressure of 0.7kPa was collected, that is, a light yellow liquid. The liquid wa...
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