Self-alignment preparation method for front electrode window of DFB laser

Abstract

The invention provides a self-alignment preparation method for a front electrode window of a DFB laser, which comprises the following steps: forming an epitaxial structure with a sacrificial layer, after forming an etching window for exposing the sacrificial layer through first etching, adopting second etching to completely remove the sacrificial layer, and removing a suspended passivation layer and a mask layer in an external force mode to completely expose a contact layer to form a front electrode completely covering the contact layer; the front electrode prepared by the method can completely cover the contact layer, so that electrode window maximization can be realized, the electrical and thermal characteristics of the DFB laser can be effectively improved, the performance of the DFB laser can be improved, and in the process of preparing the self-alignment process of the front electrode, the passivation layer on the side wall of the groove is not subjected to processes such as etching and the like, so that the lower waveguide layer, the active layer and the upper waveguide layer can be completely protected, the waveguide layers and the active layer are prevented from being damaged by the etching process, and the quality of the DFB laser is improved.

Description

technical field [0001] The invention relates to the field of optoelectronic devices, in particular to a preparation method for self-alignment of front electrode windows of a DFB laser. Background technique [0002] In modern high-speed optical communication systems, distributed feedback single-mode lasers are key devices in optical communication networks and systems. It currently has a wide range of application market prospects, such as atmospheric monitoring, measurement, sensing and other fields. In addition, it is a key component in high-speed and large-capacity optical communication systems, wavelength division multiplexing, and time division multiplexing systems. [0003] Distributed feedback laser (Distributed Feedback Laser, DFB) has excellent dynamic single longitudinal mode characteristics, mature manufacturing process, stable device performance, high reliability, and is currently the most important light source for optical fiber communication systems. High-perfor...

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Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a self-alignment preparation method for the front electrode window of a DFB laser, which is used to solve the problem that it is difficult to meet the electrical and thermal characteristics of the DFB laser in the prior art

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