A tunable mode converter and its preparation method

Abstract

A tunable mode converter and a manufacturing method thereof belong to the technical field of planar optical waveguide devices. Along the direction of light propagation, there are input few-mode straight waveguide, the first 3‑dB Y branch beam splitter, the first input straight waveguide, the second input straight waveguide, the second 3‑dB Y branch splitter, the third 3‑dB dB Y-branch splitter, four modulation arms, second 3-dB Y-branch coupler, third 3-dB Y-branch coupler, first output straight waveguide, second output straight waveguide, first 3-dB Y-branch Coupler, output few-mode straight waveguide, and four parallel heating electrodes; from bottom to top, it is a silicon wafer substrate, a silicon dioxide lower cladding layer, a strip-shaped optical waveguide core layer, and a polymer upper cladding structure; heating The electrodes are located directly above the modulation arms, and the core material has a higher refractive index than the upper cladding material. The invention achieves the purpose of mutual conversion of four optical modes by modulating the modulation arm of the MZI structure.

Description

A kind of tunable mode converter and preparation method thereof technical field The invention belongs to the planar optical waveguide device technical field, be specifically related to a kind of with silicon wafer as substrate, with dioxide Tunable type with silicon as the lower cladding layer and organic polymer material with high thermo-optic coefficient as the optical waveguide core layer and the upper cladding layer Mode converter and preparation method thereof. Background technique The rapid development of Internet technology, the amount of data that needs to be transmitted increases exponentially, and the traditional electrical interconnection has been difficult to meet. To meet the needs of the rapidly growing data transmission volume, optical interconnection came into being. Different from the traditional electrical interconnection, the optical interconnection The use of light as the data transmission medium greatly improves the data transmission speed. Tra...

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Problems solved by technology

[0005] However, the number of modes that can be converted by traditional mode converters is relatively small, and most devices cannot be tuned, which limits the further improvement of optical communication data transmission capacity.

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