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TiAlN/TiSiNiN composite coating, hard coating and preparation method and application of TiAlN/TiSiNiN composite coating

A composite coating and hard coating technology, applied in coating, metal material coating process, turning equipment, etc., can solve the problems of poor fracture toughness, inability to prepare thick coating, and fracture toughness coating is easy to collapse.

Active Publication Date: 2021-11-16
广东华升纳米科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this type of nanocrystalline / amorphous composite structure is composed of hard phases / hard phases, and the stress generated during the coating process cannot be released, so its fracture toughness is poor, and it is impossible to prepare thicker coatings. , and the coating with poor fracture toughness is easy to collapse during the actual use of the tool

Method used

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  • TiAlN/TiSiNiN composite coating, hard coating and preparation method and application of TiAlN/TiSiNiN composite coating
  • TiAlN/TiSiNiN composite coating, hard coating and preparation method and application of TiAlN/TiSiNiN composite coating

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preparation example Construction

[0044] Another aspect of the present invention provides the preparation method of the aforementioned TiAlN / TiSiNiN composite coating, comprising the following steps:

[0045] A substrate is provided, and a TiAlN / TiSiNiN composite coating is vapor-phase deposited on the substrate.

[0046] Another aspect of the present invention also provides a hard coating, which includes a transition layer and the aforementioned TiAlN / TiSiNiN composite coating, where the transition layer is a TiN transition layer and / or a TiAlN transition layer.

[0047] In some embodiments, the transition layer has a thickness of 0.1 μm to 1.5 μm.

[0048] In some embodiments, the transition layer is a TiN transition layer and a TiAlN transition layer, wherein the thickness of the TiN transition layer is 0.1 μm to 0.5 μm, and the thickness of the TiAlN transition layer is 0.2 μm to 1 μm. Preferably, the thickness of the TiN transition layer is 0.1 μm˜0.3 μm, and the thickness of the TiAlN transition layer i...

Embodiment 1

[0084] a). Put the polished milling cutter into an ultrasonic cleaning machine, ultrasonically clean it with acetone and alcohol in turn, then dry it with hot air, and put it into the vacuum chamber of the coating equipment;

[0085] b). Vacuumize the vacuum chamber of the coating equipment so that the pressure in the vacuum chamber is 3.0×10 -3 Pa; Turn on the heater in the vacuum chamber to raise the temperature in the vacuum chamber to 450°C, then pass in argon gas, adjust the pressure in the vacuum chamber to 0.8Pa, turn on the bias power of the workpiece turret and set it to -210V, and then turn on the arc enhancement glow Photodischarge power supply, argon ion etching cleaning on the surface of the milling cutter, cleaning time is 40min;

[0086] c). Adjust the bias voltage of the milling cutter to -100V, feed nitrogen and control the air pressure to 2.8Pa, turn on the pure Ti target arc source, and deposit the TiN layer, the deposition time is 20min, and the deposition ...

Embodiment 2

[0090] Example 2 is basically the same as Example 1, except that in step d), the mass percentages of elements in the TiSiNiN layer are: Ti: 35%, Si: 12%, Ni: 3%, and N: 50%.

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Abstract

The invention relates to the technical field of surface protection, in particular to a TiAlN / TiSiNiN composite coating as well as a preparation method and application thereof. The TiAlN / TiSiNiN composite coating is formed by alternately depositing TiAlN layers and TiSiNiN layers; the mass percent of each element in each layer and the thicknesses of adjacent TiAlN layers and TiSiNiN layers are limited, so that the prepared composite coating not only has high hardness and high wear resistance of a TiAlN coating, but also has high-temperature oxidation resistance of a TiSiN coating; meanwhile, the Ni element is introduced to form a metal Ni phase; the metal Ni phase serves as an interface phase to wrap the periphery of a nanocrystalline phase; due to the fact that the metal Ni phase can play a role in absorbing plastic deformation work and fracture work, the fracture toughness of the coating is enhanced; therefore, the composite coating has high hardness, high wear resistance, excellent high-temperature oxidation resistance and fracture toughness; the comprehensive performance of the titanium nitride coating is effectively improved; and the application scene is widened.

Description

technical field [0001] The invention relates to the technical field of surface protection, in particular to a TiAlN / TiSiNiN composite coating and its preparation method and application. Background technique [0002] With the development of tool cutting technology, people have put forward higher requirements for the material and performance of the tool: dry, high-speed, high-precision cutting has become an important direction of tool cutting development, among which, hard coating is deposited on the surface of the tool It is an important way to improve the cutting performance of cutting tools. [0003] Due to its excellent properties such as high hardness, high wear resistance and high temperature oxidation resistance, TiAlN is one of the widely used ternary nitride hard coatings, especially in the field of tool cutting, which greatly improves the tool quality. cutting performance and service life. The working temperature of TiAlN is generally around 750°C to 850°C. However...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/35C23C14/06C23C14/50B23B27/00
CPCC23C14/325C23C14/35C23C14/0036C23C14/0641C23C14/505C23C14/3485B23B27/00
Inventor 林海天李立升郑礼伟陈松杨恺
Owner 广东华升纳米科技股份有限公司
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