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Strontium ruthenate material, and preparation method and application thereof

A technology of strontium ruthenate and raw materials, applied in the field of strontium ruthenate materials and preparation thereof, can solve the problems of lack of large-scale synthesis and production methods, limited reference information, etc., and achieves improved yield, reduced particle defects, and high density. Effect

Active Publication Date: 2021-12-03
PIONEER MATERIALS INC CHENGDU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It should be pointed out that strontium ruthenate is a new type of material with great potential. There is very limited reference information for its research and development, market application, etc. At present, strontium ruthenate materials still lack effective large-scale synthesis and production methods

Method used

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  • Strontium ruthenate material, and preparation method and application thereof
  • Strontium ruthenate material, and preparation method and application thereof
  • Strontium ruthenate material, and preparation method and application thereof

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preparation example Construction

[0036] This application proposes a method for preparing strontium ruthenate material, which mainly includes the following steps: vacuum hot-press sintering is carried out on the raw materials for the preparation of strontium ruthenate material, and the vacuum hot-press sintering conditions include: vacuum degree≤10 -3 Pa, the hot-pressing temperature is 600-850°C, the hot-pressing pressure is 58.5-100MPa, and the hot-pressing time is 3-3.5h.

[0037] The above preparation raw materials can be obtained through the following steps: baking the mixed raw materials obtained by mixing the ruthenium source and the strontium source at 120-180° C. for 2-3 hours.

[0038] Among them, the source of strontium is SrO, the source of ruthenium is RuO 2 , the strontium source and the ruthenium source are mixed in a molar ratio of 0.9-1.1:0.9-1.1, and the optimal molar ratio is 1:1. When the mixing molar ratio of the strontium source and the ruthenium source is not 1:1, preferably the rutheni...

Embodiment 1

[0076] This embodiment provides a method for preparing a strontium ruthenate target, the main process of which is as follows figure 1 As shown, it is specifically divided into preparation of ruthenium source and strontium source, pulverization by crushing, powder mixing, baking, vacuum hot pressing sintering and mechanical processing.

[0077] details as follows:

[0078] With SrO and RuO 2 As strontium source and ruthenium source respectively, they are crushed into 100-400 mesh powder in a container filled with argon gas at room temperature. SrO powder and RuO 2 The powder is placed in an argon-filled container at a molar ratio of 1:1 for stirring and mixing. The mixing process is carried out by placing the above-mentioned mixing container in a temperature-controlled furnace and mixing at 150°C for 2.5 hours. After mixing, let it cool down to room temperature naturally, and pack it in vacuum plastic for later use.

[0079]Subsequently, the above-mentioned mixed powder aft...

Embodiment 2

[0087] This embodiment provides a method for preparing a strontium ruthenate target, the difference from Embodiment 1 is mainly as follows (other conditions are the same):

[0088] Will install SrO and RuO 2 The mold of the mixed powder is placed in the cavity of the vacuum hot press, and then vacuumed to a vacuum degree of about 8.0×10 -4 Pa. The cavity is heated to 850° C., and a pressure of 90 MPa on the longitudinal axis is applied to both ends of the mold in the cavity, and the temperature is maintained for 180 minutes.

[0089] With the test method of embodiment 1, the SrRuO provided by the present embodiment 3 The cross-sectional microstructure of the target sample is dense and uniform, and the SrRuO 3 The density of the target sample is 5.7g / cm 3 , the resistivity is 0.006Ω / Sq, which is a good electrical conductor. The strontium ruthenate target obtained in this embodiment can also be sputtered by DC plasma.

[0090] The atomic ratio Sr:Ru of Sr and Ru in the str...

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Abstract

The invention discloses a strontium ruthenate material, and a preparation method and application thereof, and belongs to the technical field of strontium ruthenate materials. The preparation method comprises the following steps: performing vacuum hot pressing sintering on raw materials for preparing the strontium ruthenate material, wherein the vacuum hot pressing sintering conditions are as follows: the vacuum degree is less than or equal to 10<-3> Pa, the hot pressing temperature is 600-850 DEG C, the hot pressing pressure is 58.5-100MPa, and the hot pressing time is 3-3.5 h. Vacuum hot pressed sintering is carried out under the conditions, and the strontium ruthenate material with high density, high purity and strict atomic proportion can be prepared. The strontium ruthenate material can be used for processing sputtering target materials and the like, and in the sputtering process, particle defects are reduced, and the product quality is improved.

Description

technical field [0001] The invention relates to the technical field of strontium ruthenate materials, in particular to a strontium ruthenate material and its preparation method and application. Background technique [0002] Strontium ruthenate (molecular formula: SrRuO 3 ) has attracted the attention of academic and industrial circles in recent years, mainly because of the unique physical properties of this material: it has excellent ferromagnetic and conductive properties. At certain temperatures, the material also exhibits the ability to superconduct. The material is also easy to epitaxially grow a single crystal film on a substrate with similar lattice parameters under specific film deposition conditions, so that this film can be used in the production of devices for various special applications. It should be pointed out that strontium ruthenate is a new type of material with great potential. There is very limited reference information for its research and development a...

Claims

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Application Information

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IPC IPC(8): C04B35/01C04B35/622C04B35/645C23C14/08C23C14/34
CPCC04B35/01C04B35/622C04B35/645C23C14/08C23C14/3442C04B2235/3213C04B2235/5427C04B2235/5436C04B2235/602C04B2235/656C04B2235/6567C04B2235/6581
Inventor 李宗雨丘立安梁放韩正非鲁波
Owner PIONEER MATERIALS INC CHENGDU
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