A kind of high permeability hydrophobic dustproof film and preparation method thereof
A dust-proof film and hydrophobic technology, which is applied in the coating process of metal materials, coatings, special surfaces, etc., can solve the problems of unsatisfactory dust removal effect, complicated preparation process, poor film bonding force, etc., and achieve strong adhesion and process Simple, Inexpensive Effects
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[0054] 1. Substrate pretreatment
[0055] Ultrasonic cleaning of glass substrates:
[0056]First, use anhydrous ethanol to clean for 15 minutes, and the number of cleanings is 1; then use acetone to clean for 20 minutes, and the number of cleanings is 1; then use anhydrous ethanol to clean for 15 minutes, and the number of cleanings is 2 times; The number of cleanings is 1 time; then use absolute ethanol to clean for 15min, and the number of cleanings is 1 time; finally, it is dried at 70°C for 1h.
[0057] 2. Preparation of coating
[0058] (1) Preparation of the lower film layer:
[0059] The pre-treated glass substrate is subjected to atomic layer deposition, and a ZnO film is deposited on the surface of the glass substrate. The specific operation is called:
[0060] (1) Put the substrate processed in step 1 in the deposition chamber of the atomic layer deposition apparatus, and pump the vacuum chamber to 5×10 -3 Torr, then pass nitrogen until the chamber pressure is 0....
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