Precision axial focusing device and method for high-power laser processing
A laser processing, high-power technology, applied in laser welding equipment, metal processing equipment, optics, etc., can solve the problems of difficult application, high energy density at the focal point of the objective lens, and easily damaged mirrors, etc., to achieve the effect of improving quality
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Embodiment 1
[0052] This embodiment provides a precise axial focusing device for high-power laser processing, which can realize high-power precise axial focusing.
[0053] Such as figure 1 , figure 2 As shown, the device of this embodiment mainly includes:
[0054] A high-power laser source 1 is used to generate a high-power linearly polarized laser beam. The high-power laser source can be a high-power continuous laser or a high-power ultrashort pulse laser, and the laser wavelength covers ultraviolet wavelengths, visible light wavelengths, and infrared wavelengths.
[0055] The converging lens group 23 is used to focus the high-power linearly polarized laser beam to form a converging beam;
[0056] Axial focusing component 2, select any point other than the focal point of the converging beam in the axial direction as the focusing center point, set the axial focusing range centered on the focusing center point, and place the axial focusing component on the axis It is within the focusi...
Embodiment 2
[0078] Furthermore, when the reflected light at different focusing positions passes through the converging lens group in reverse, different degrees of wavefront aberration will be introduced according to the divergence angle of the reflected light, and a certain degree of wavefront image will also be introduced when the beam passes through the focusing objective lens Poor, making the quality of the converged spot worse.
[0079] In order to improve the quality of the focused spot, this embodiment optimizes the design of the converging lens group 23, the beam collimation compensation component 3 and the focusing objective lens, so that the wavefront image introduced by the system composed of the converging lens group 23 and the beam collimation compensation component 3 The difference can compensate the wavefront aberration introduced when deviating from the focal plane of the focusing objective lens 5, thereby improving the quality of the focused spot.
[0080] Such as Figure...
Embodiment 3
[0093] This embodiment provides a precise axial focusing method for high-power laser processing, including the following steps:
[0094] Step S1, outputting a high-power linearly polarized laser beam and focusing it to form a converged beam;
[0095] Step S2, choose any point other than the focal point of the converged beam in the axial direction as the focus center point, set the axial focus range centered on the focus center point; reflect the converged beam, and adjust the reflected beam by axial movement Divergence angle to achieve axial focus;
[0096] Step S3, enlarge or reduce the divergence angle of the converging or diverging reflected beam in step S2 to compensate the collimation of the beam. shoot out
[0097] Step S4 , adjusting the deflection direction of the light beam in two lateral dimensions after the collimation compensation, realizing horizontal two-dimensional scanning, and focusing the horizontal two-dimensional scanning light beam.
[0098]Further, in ...
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Abstract
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