Spray gun for plasma physical vapor deposition and preparation method of thermal barrier coating
A physical vapor deposition and plasma technology, applied in coating, ion implantation plating, metal material coating process, etc., can solve problems such as anode burn-through, unstable arc ignition, and inability to gasify powder, so as to increase the negative and positive The effect of inter-electrode distance, reduction of production cost, and reduction of current density
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Embodiment 1
[0068] Using a five-cathode high-efficiency and low-cost plasma torch, the top view is as follows figure 2 As shown in the figure, the symmetrically distributed hollow water-cooled cathode and the powder feeding tube located on the central axis are selected as the working gas for arc ignition, and Ar and H are selected as the working gas when the arc is stable. 2 gas mixture. The spray gun was installed on the plasma physical vapor deposition equipment, and the YSZ powder was agglomerated and granulated. The powder D50 was 10-20 μm, and the powder morphology was spherical, such as Figure 3a shown,
[0069] The specific spraying steps are as follows:
[0070] Step 1: Close the vacuum chamber and evacuate so that the pressure of the vacuum chamber is lower than 0.08 mbar;
[0071] Step 2: Fill with Ar gas until the vacuum chamber pressure reaches 130 mbar;
[0072] Step 3: start the arc, start the arc between the hollow water-cooled cathode and the auxiliary anode at a low...
Embodiment 2
[0081] A three-cathode spray gun of the present invention is installed on the plasma physical vapor deposition equipment, and the columnar structure coating is prepared by using the ungranulated nano-powder, the nano-powder D50 is 0.5-1 μm, and the powder is irregular in shape, such as: Figure 4a shown. The specific spraying steps are as follows:
[0082] Step 1: Close the vacuum chamber and evacuate, so that the pressure of the vacuum chamber is lower than 0.08mbar;
[0083] Step 2: Fill with Ar gas until the vacuum chamber pressure reaches 130mbar;
[0084] Step 3: striking the arc, starting the arc between the hollow water-cooled cathode and the auxiliary anode at a low current of 30A and an Ar gas flow of 15L / min;
[0085] Step 4: Lengthen the plasma arc, after the plasma arc is stable, increase the current between the hollow water-cooled cathode and the water-cooled anode to 65A, adjust the Ar flow to 30L / min, H 2 The air flow is 30L / min, and the plasma arc is transfe...
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