Green ultrafast laser welding method and system between glass

An ultra-fast laser and welding method technology, applied in laser welding equipment, welding equipment, welding/welding/cutting objects, etc., can solve the difficulty of guaranteeing the energy consistency of two-photon multi-photon pulse trains, and the inconsistency of welding quality in time domain and space domain Non-uniformity, incomplete roughness, etc

Pending Publication Date: 2022-03-22
北京赢圣科技有限公司
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  • Application Information

AI Technical Summary

Problems solved by technology

However, in reality, the energy consistency of two-photon or multi-photon pulse trains is almost difficult to guarantee. In practice, the melting state of the glass at the welding position and the surface morphology will show inconsistent states.
Moreover, in practice, the two-photon or multi-photon pulse train itself has differences in the time domain, which is likely to cause a slight drift in the welding position during the welding process, resulting in the accuracy of the welding position.
Therefore, this solution will eventually lead to inconsistency and inhomogeneity of the welding quality in the time domain and space domain, the welding surface is undulating, and the roughness is not completely consistent, making it difficult to actively control the entire welding process, and the welding quality is not high

Method used

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  • Green ultrafast laser welding method and system between glass
  • Green ultrafast laser welding method and system between glass
  • Green ultrafast laser welding method and system between glass

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0065] The laser is connected to the computer installed with the laser welding system software through the data line, and the computer inputs the controlled laser power, scanning speed, and repetition frequency signals to the laser. The laser is an all-solid-state picosecond laser with a laser wavelength of 532±5nm. The controller receives the pulse synchronization signal of the laser, and simultaneously controls the optical path, vibrating mirror, field mirror and six-axis motion system to complete welding.

[0066] The locked emission frequency is 50KHz; the single pulse energy is 50uJ. The single pulse width is 15ps.

[0067] The distance between the laser dynamic focusing module and the laser transmission direction is ±10mm.

[0068] The shaping optical path is a beam expanding optical path with a magnification of 5 times.

[0069] The beam transmission optical path is composed of a transmission optical path with a transmission distance of 500mm.

[0070] The depth of f...

Embodiment 2

[0078] Basically the same as Example 1, the difference is that,

[0079] The locking emission frequency is 10KHz; the single pulse energy is 1000uJ. The single pulse width is 1ps.

[0080] The distance between the laser dynamic focusing module and the laser transmission direction is ±5mm.

[0081] The shaping optical path is a beam expanding optical path with a magnification of 8 times.

[0082] The beam transmission optical path is composed of a transmission optical path with a transmission distance of 1000mm.

[0083] The field lens is an F-θ field lens with a focal length of 300mm.

[0084] The minimum area resolution feature size of the microstructure forming the solder pattern is 0.5mm 2 .

[0085] The laser beam passes through the transparent material to carry out laser welding on the working surface, specifically the welding at the interface position of the two workpieces, a total of one welding surface.

[0086] Welding effect such as Figure 5 , 6 shown.

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Abstract

The invention provides a green-light ultrafast laser welding method and system between glass. The green-light ultrafast laser welding method comprises the following steps: 1) ultrasonically cleaning and drying a substrate to be welded; (2) two substrates to be welded are stacked together and placed on a workpiece bearing table to be welded; (3) under the control of a software and hardware controller, focusing parameters of a dynamic focusing module are controlled, and a laser light path is adjusted, so that the laser focal depth of the welding position is larger than the distance between welding substrates; and (4) laser welding of 1-N welding faces is achieved, and the distance resolution between the welding faces is controlled to be 1-10 micrometers. According to the welding method, the laser focal depth is larger than the distance between the glass workpieces, photon monopulse energy is high, consistency is good, the requirement for the distance between the two surfaces to be welded is low, and the welding area is high in strength, uniform in quality and high in sealing performance.

Description

technical field [0001] The invention relates to the technical field of laser welding, in particular to a green light ultrafast laser welding method and system between glasses. Background technique [0002] In fields such as aerospace with high strength requirements and harsh working environments, and implanted microelectronics with high sealing requirements and low long-term volatility requirements, the transparent material packaging method of using adhesives to bond two glass surfaces cannot obtain long-term practical applications. application. [0003] Laser welding has played an important role in the welding of micro components in the fields of electronics, automobiles and medicine due to its advantages of high connection strength, high precision, flexibility, non-contact, and small workpiece shape restrictions, and has been rapidly adopted in the industrial field. develop. [0004] Ultrafast pulsed laser can produce nonlinear effects in transparent materials, even the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/21B23K26/0622B23K26/70
CPCB23K26/21B23K26/0622B23K26/702B23K2103/54
Inventor 不公告发明人
Owner 北京赢圣科技有限公司
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