Method and system for precisely engraving transparent material through frequency-locking single-pulse green ultrafast laser
An ultra-fast laser and transparent material technology, applied in laser welding equipment, welding equipment, metal processing equipment, etc., can solve the problem of material strength weakening, and achieve fast processing time, accurate timing matching, and good consistency
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Embodiment 1
[0075] Example 1: Precise engraving of "lizard" pattern on glass surface
[0076] The laser is connected to the computer installed with the laser engraving system software through the data line, and the computer inputs the controlled laser power, scanning speed, and repetition frequency signals to the laser, and the laser is an all-solid-state picosecond laser. The controller receives the pulse synchronization signal of the laser, and at the same time controls the optical path, vibrating mirror, field mirror and six-axis motion system to complete the engraving.
[0077] The locked emission frequency is 50KHz; the single pulse energy is 50uJ. The single pulse width is 10ps.
[0078] The laser window spot is 2mm, and the divergence angle is 1.0mrad.
[0079] The shaping optical path is a beam expanding optical path with a magnification of 5 times.
[0080] The beam transmission optical path is composed of a transmission optical path with a transmission distance of 500mm.
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Embodiment 2
[0089] Example 2: Precise engraving of the "three-dimensional floor plan" pattern inside the glass
[0090] Basically the same as Example 1, the difference is that,
[0091] The locking emission frequency is 10KHz; the single pulse energy is 1000uJ. The single pulse width is 1ps.
[0092] The laser window spot size is 3mm, and the divergence angle is 1.5mrad.
[0093] The shaping optical path is a beam expanding optical path with a magnification of 8 times.
[0094] The beam transmission optical path is composed of a transmission optical path with a transmission distance of 1000mm.
[0095] The working frequency of the vibrating mirror is 50k, and the lens size of the vibrating mirror is 30mm.
[0096] The field lens is an F-θ field lens with a focal length of 300mm.
[0097] The minimum resolution feature size for forming the engraved pattern microstructure is 1um.
[0098] Engraving effect such as image 3 shown.
Embodiment 3
[0099] Example 3: "Pentagram" hole engraving on glass
[0100] Basically the same as Example 1, the difference is that,
[0101] The locking emission frequency is 200KHz; the single pulse energy is 300uJ. The single pulse width is 10ps.
[0102] The laser window spot size is 1mm, and the divergence angle is 0.5mrad.
[0103] The shaping optical path is a beam expanding optical path with a magnification of 1 times.
[0104] The beam transmission optical path is composed of a transmission optical path with a transmission distance of 100mm.
[0105] The working frequency of the vibrating mirror is 200k, and the lens size of the vibrating mirror is 5mm.
[0106] The field lens is a telecentric field lens with a focal length of 30mm.
[0107] The minimum resolution feature size for forming the engraved pattern microstructure is 4um.
[0108] Engraving effect such as Figure 4 As shown, the notch is neat and there are no cracks.
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