Film coating method using hybridized mixed refractive index material

A refractive index and hybrid technology, applied in sputtering coating, metal material coating process, ion implantation coating, etc., can solve the problems of fixed refractive index of coating material and easy change of spectral characteristics of light band, and achieve the best coating performance. Strong, tightly adhered effect

Pending Publication Date: 2022-03-25
HENAN DUBANG PHOTOELECTRIC CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

While changing the thickness, the spectral characteristics of the visible light band are easy to change, and the hue perceived by the

Method used

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  • Film coating method using hybridized mixed refractive index material
  • Film coating method using hybridized mixed refractive index material
  • Film coating method using hybridized mixed refractive index material

Examples

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Example Embodiment

[0020] Example 1

[0021] The mixed refractive index coating method of the present invention is substrate, and the film system constitutes a substrate. 2 Si a NB b O c (Or Si p Ti q O r ), Etc., where SI a NB b O c Or (SI p Ti q O r Molecular proportion of dielectric materials can be adjusted by device parameters. As in the magnetron sputtering apparatus, 2.0 kW (1-18 kW range can be applied above), and 12.0 kW (1-18kW range) is applied over the NB target, and a small amount of Si is mixed. Si a NB b O c The mixed hybrid plating layer is about 2.22, which is lower than NB. 2 O 5 2.34. The film layer structure is from the first layer to the sixth layer: SiO 2 Si a NB b O c SiO 2 Si a NB b O c SiO 2 Si a NB b O c . Among them, 1≤a ≤ 3, 0 ≤ b ≤ 3, 1 ≤ C ≤ 10, 1 ≤ p ≤ 3, 0 ≤ Q ≤ 3, 1 ≤ R ≤ 10. The film layer is a gold coating system, and Table 1 is the thickness of the golden film design.

[0022] Table 1: (the thickness of the golden film design)

[0023]

[0024] The coating proce...

Example Embodiment

[0037] Example 2

[0038] A hybrid refractive index coating method of the present invention mainly indicates the role of the coating method in the adjustment of the film laminate stress. Such as figure 2 As shown, the PET or glass material is a substrate to constitute a material for SiO. 2 / Si a NB b O c High bright green film system for low refractive index layers, NB 2 O 5 Do a high refractive index layer, SIO 2 Pure material than NB 2 O 5 The internal stress is much larger, generally sputtering film forming thickness SiO 2 Thin layer stress value is approximately NB 2 O 5 More than six times, doped NB molecules Si a NB b O c Material can effectively reduce stress. In this example, use SI a NB b O c / NB 2 O 5 Do low / high refractive index layers, compared to traditional SIO 2 / NB 2 O 5 The structure can effectively reduce the internal stress, which is very suitable for surface coating of flexible substrates. The film layer structure is from the first layer to sixth layer: Si...

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Abstract

The invention discloses a film coating method using a hybrid mixed refractive index material, which comprises the following steps of: performing optical film coating by taking PET (Polyethylene Terephthalate) plastic/glass/ceramic as a substrate and using SiO2 with low refractive index, Si3N4 or SiaNbbOc or SipTiqOr with high refractive index and the like by using magnetron sputtering equipment or electron beam evaporation equipment. According to the invention, the film coating technology of optical deposition is realized by using the low-refractive-index layer, the high-refractive-index layer and the mixed material refractive-index layer which are crossed. Compared with a traditional high and low refractive index laminated structure, the mixed refractive index layer can realize convenient regulation and control of reflection/transmission intensity, and the hardness and stress performance of a film layer material can be adjusted, so that the physical performance of a more tough film layer can be matched.

Description

technical field [0001] The invention relates to the manufacture of optical thin films, in particular to a coating method using hybrid mixed refractive index materials, which is a stress-controllable, light-reflecting method for depositing colorful and durable thin films on plastic surfaces, glass substrates or ceramic surfaces. Strong uniform and adjustable coating method. Background technique [0002] At present, the appearance of the shell used for the appearance of electronic products needs to be designed in color to meet the aesthetics of consumers and the coordination of the overall appearance of the product. Generally speaking, surface processing methods such as coating technology and paint printing can only achieve a certain color, and the firmness of the colored layer mostly cannot meet the harsh environmental test requirements. Therefore, sputtering or evaporation coating processing methods are generally used to achieve a firm colored thin layer on the surface of a...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/10C23C14/08C23C14/30G02B1/10
CPCC23C14/0036C23C14/10C23C14/08C23C14/0015C23C14/30G02B1/10
Inventor 李智超毕文江朱金波杨全柱王龙赵二帅牛延赐彭阳雷鸣宇
Owner HENAN DUBANG PHOTOELECTRIC CO LTD
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