High-sensitivity image sensor pixel structure
An image sensor, high-sensitivity technology, used in image communication, electrical solid-state devices, semiconductor devices, etc., can solve the problem of increasing the parasitic capacitance of the FD point, reduce the thickness of the gate oxide, improve the signal-to-noise ratio, and reduce the capacitance. Effect
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[0057] Such as figure 2 , Figure 4 Shown:
[0058] Including a photodiode 101 placed in a semiconductor substrate, a transfer transistor 103, a floating diffusion node 104, a reset transistor 105, a thick gate oxygen source follower transistor 111, a thin gate oxygen source follower transistor 112, a row gate transistor 108, and a power supply 106 And pixel output 109;
[0059] By using the thick gate oxide source follower transistor 111 / thin gate oxide source follower transistor 112, the charge-to-voltage conversion factor can be improved under the premise of reducing 1 / f noise, thereby improving the sensitivity of the image sensor.
[0060] The specific principle is:
[0061] By increasing the gate oxide thickness of the thick gate oxygen source follower transistor 111 connected to the floating diffusion node 104 and reducing the area of the thick gate oxygen source follower transistor 111, the capacitance between the floating diffusion node 104 and the substrate is r...
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