Al-coated Al3Ti intermetallic compound nanoparticles and preparation method thereof
A technology of intermetallic compounds and nanoparticles, applied in metal material coating process, sputtering plating, vacuum evaporation plating, etc., can solve the difficulty of adding nanoparticles, and the range of shape and size of ceramic nanoparticles is not wide , Dimensional accuracy and dimensional uniformity are not high, to achieve the effect of improving performance, high dimensional accuracy and dimensional uniformity, and achieving uniform distribution
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0023] This embodiment uses a multimpoically magnetron sputtering apparatus, which controls pure Al target and pure Ti target by two separate cathodes, respectively, and specific steps include:
[0024] Step 1) Pump the air chamber of the vacuum chamber to 10 -3 After the PA or less, the purified Al substrate in the vacuum chamber was heated (and held at 600 ° C throughout the deposited plating film), sputtered on the Al substrate, a Al-deposition of 100 nm;
[0025] Step 2) The charge is charged and the pressure is 6 × 10 -1 PA, deposition Al layer on the Al transition layer; then charge Ar gas and maintain its pressure of 6 × 10 -1 PA, deposition Al in the Al layer 3 The two-phase structural layer composed of Ti and Al, controlling the Ti content in the two phase structures, the thickness of the two-phase structure layer in the two-phase structure layer by adjusting the power of the Al target and Ti target, and the thickness of the Al layer and the two phase structures is contro...
Embodiment 2
[0029] In this example, the substrate temperature is maintained at 625 ° C, and the thickness of the two phase structures is 100 nm, the thickness of the multilayer structure composite film is 10 nm, and the total thickness of the multilayer structure composite film is the thickness of the multilayer structure composite film. About 10 μm, a cylindrical Al is obtained by Al-coated and bonded together 3 Ti nanoparticles, Al3 The average diameter of Ti nanoparticles is 20 nm, and the length is 100 nm.
Embodiment 3
[0031] In this example, the substrate temperature is maintained at 650 ° C, and the thickness of the two phase structures is 30 nm, the thickness of the Al layer is 10 nm, and the total thickness of the multilayer structure composite film is controlled by the control of the deposition of the plating time. About 10 μm, is obtained by Allax Allax Al, which is coated and bonded together 3 Ti nanoparticles, Al 3 The average diameter and length of Ti nanoparticles were 30 nm.
[0032] In summary, the present invention passes through a huge melting point temperature and moisture but insoluble Al. 3 Ti and Al-specific proportion of two-phase material combination, especially the prior art gap deposited by the substrate temperature at a temperature close to Al melting point, obtained with Al 3 Ti columnar crystal and Al separated two-phase structural layers, further use only Al layer block two-phase structural layer Al 3 The multilayer structure composite film method of Ti columnar crystal...
PUM
| Property | Measurement | Unit |
|---|---|---|
| diameter | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More - R&D
- Intellectual Property
- Life Sciences
- Materials
- Tech Scout
- Unparalleled Data Quality
- Higher Quality Content
- 60% Fewer Hallucinations
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com


