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Passive near-field optical scanning microscopic system based on composite probe and detection system

A composite probe and near-field optics technology, applied in scanning probe microscopy, scanning probe technology, measurement devices, etc., can solve the problems of easy oxidation of silver nanowires, harsh test conditions, etc., to reduce the difficulty of preparation, Low-cost, easy-to-use effects

Pending Publication Date: 2022-04-26
UNIV OF SHANGHAI FOR SCI & TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the system uses a tunneling current feedback system, it is necessary to maintain the conductivity of the probe and the sample during the near-field scanning process; and the silver nanowires are easy to oxidize, the test conditions of the system are very harsh

Method used

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  • Passive near-field optical scanning microscopic system based on composite probe and detection system
  • Passive near-field optical scanning microscopic system based on composite probe and detection system
  • Passive near-field optical scanning microscopic system based on composite probe and detection system

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Embodiment 1

[0033] This embodiment describes in detail the composite probe-based passive near-field optical scanning microscope system (hereinafter referred to as the passive near-field optical scanning system) 100 .

[0034] figure 1 It is a device schematic diagram of a passive near-field optical scanning system in an embodiment of the present invention; figure 2 It is the image of the semiconductor nanowire / tapered micro-fiber probe under the dark field microscope in the embodiment of the present invention; image 3 It is a schematic diagram of the scanning detection part of the passive near-field optical scanning system in the embodiment of the present invention. in, image 3 for figure 2 The enlarged schematic diagram of the part A framed by the dotted line in the middle omits the imaging module.

[0035] like Figure 1-3 As shown, hereinafter referred to as passive near-field optical scanning system 100 is used for scanning and imaging target sample 60 , including scanning st...

Embodiment 2

[0070] In this embodiment, the composite probe-based passive near-field optical detection system 200 , hereinafter referred to as the passive near-field optical detection system 200 , is described in detail.

[0071] Figure 8 It is a schematic structural diagram of the passive near-field optical detection system in Embodiment 2 of the present invention.

[0072] like Figure 8 As shown, the passive near-field optical detection system 200 is used to measure the evanescent field of the sample to be tested. Since the measurement of the evanescent field must make the laser pass through the micro-nano fiber to make the evanescent field exist on the surface, a coupling optical path is built outside the scanning system 100 . That is, the passive near-field optical detection system 200 includes the passive near-field optical scanning system 100 in Embodiment 1 and a coupling optical path composed of a laser 201 , a collimator 202 , a detection objective lens 203 , and a lock-in ampli...

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Abstract

The invention belongs to the technical field of microscopic imaging, and provides a passive near-field optical scanning microscopic system based on a composite probe and a detection system. The detection system comprises a passive near-field optical scanning microscopic system based on a composite probe and a coupling light path composed of a laser, a collimator, a detection objective lens and a lock-in amplifier. The scanning microscopic system adopts a passive nano probe, and the strong constraint advantage of the nano probe on reflected light on the surface of a sample is reserved. The theoretical collection efficiency is 0.65 per mill, and is improved by one order of magnitude compared with the collection efficiency of a traditional metal coating near-field probe; a detected light intensity signal is transmitted to a far field for photoelectric detection through efficient evanescent field coupling between the cadmium sulfide nanowire and the conical micro optical fiber probe, finally analysis imaging of the morphology of a target sample is achieved, and the measurement error of the width of the sample is within 7.28%. The detection system can detect near-field information of the active sample.

Description

technical field [0001] The invention belongs to the technical field of microscopic imaging, and in particular relates to a composite probe-based passive near-field optical scanning microscopic system and a detection system. Background technique [0002] Microscopic technology realizes the visual resolution of human beings at the micron or even nanometer level, which greatly promotes the research on the interaction between light and matter and the development of microstructure signal detection and other technologies. Low-cost, high-resolution imaging systems are of great significance for human sample research in the fields of biological science and material science. [0003] The near-field scanning optical microscope technology combines the near-field scanning structure and photoelectric detection ideas, retains the advantages of flexible and non-destructive testing conditions of traditional optical microscopy, and can break through its diffraction limit. Optical probes are ...

Claims

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Application Information

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IPC IPC(8): G01Q60/18
CPCG01Q60/18
Inventor 谷付星窦琳麻艳娜顾兆麒刘家彤刘志辉
Owner UNIV OF SHANGHAI FOR SCI & TECH
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