Nitrogen and oxygen detection sensor chip

A technology for detecting sensors and chips, used in instruments, measuring devices, scientific instruments, etc., can solve the problems of variable influencing factors, complex circuits, and various types of test parameters, and achieve a simplified manufacturing process, simple structure, and simplified three-loop work. mode effect

Pending Publication Date: 2022-05-24
有研科技集团有限公司
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  • Description
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  • Application Information

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Problems solved by technology

When the sensor works, the external electrode and the reference electrode are shared, the applied voltage is correlated wi

Method used

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  • Nitrogen and oxygen detection sensor chip
  • Nitrogen and oxygen detection sensor chip

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Example Embodiment

[0034] Embodiments

[0035] In the present embodiment, the structure of the sensor chip is as follows Figure 2 as shown. In the present embodiment, the heating electrode 11 component is Pt; the insulation layer 21 component is dense alumina; the capacitive electrode (+) 22, the capacitive electrode (-) 41 component is Pt; the electrode insulation layer 42 material is dense alumina; the test electrode (-) 43 components are PtRh alloy, wherein the Pt content is 60-95%, Rh content is 5-40%; the test electrode (+) 44 components are Pt. The first layer of substrate 1, the second layer of substrate 2, the third layer of substrate 3, the fourth layer of substrate 4 are all zirconia ceramics.

[0036] The test process and principle of the present invention:

[0037] Step 1, by heating the electrode 11 to heat the test area to 650-850 ° C, the first cavity 32, the second cavity 34 of the part heated.

[0038] Step 2, the capacitive electrode (+) 22, capacitive electrode (-) 41 energized, v...

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Abstract

The invention discloses a nitrogen and oxygen detection sensor chip. The sensor chip is formed by laminating four layers of substrates, the four layers of substrates sequentially comprise a first layer of substrate, a second layer of substrate, a third layer of substrate and a fourth layer of substrate from bottom to top, and the four layers of substrates are all made of zirconium oxide; a snakelike heating electrode is printed on the surface of the first-layer substrate; an insulating layer covering the heating electrode is printed at the bottom of the second-layer substrate, and a capacitance electrode (+) is printed at a top test end; the third-layer substrate sequentially comprises a first diffusion barrier, a first cavity, a second diffusion barrier and a second cavity; a capacitance electrode (-) is printed at a position, corresponding to the first cavity, of the bottom of the fourth-layer substrate, and a test electrode (-) is printed at a position, corresponding to the second cavity, of the bottom of the fourth-layer substrate; a test electrode (+) is printed on the top of the fourth layer of substrate, and the top of the test electrode (+) is covered with a porous protective layer. According to the invention, the structure of the nitrogen-oxygen detection sensor chip is simplified, the test loop is optimized, and the use of noble metal Au is avoided.

Description

Technical field [0001] The present invention relates to a nitrogen oxygen detection sensor chip, belonging to the field of gas sensor technology. Background [0002] With the updating of the national motor vehicle pollutant emission standards, the requirements for the toxic and harmful gas content of automobile exhaust emissions are becoming more and more stringent. Among them, nitrogen oxides are the main pollutants, and the emission standards are even more stringent. Conventional automotive electrolyte-type NOx gas sensors mainly include three working circuits, such as Figure 1 As shown, the three circuits are interrelated and influence each other, and the electrode material involves a variety of components such as Pt, PtAu, PtRh and so on. The complexity of the working circuit and the diversity of electrode material composition are the main difficulties and technical barriers of traditional sensors. [0003] as Figure 1 As shown, when this type of sensor is working, it is nece...

Claims

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Application Information

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IPC IPC(8): G01N27/407G01N27/30
CPCG01N27/4073G01N27/30Y02T10/40
Inventor 张晓崔建东杨志民
Owner 有研科技集团有限公司
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