Nitrogen and oxygen detection sensor chip

Abstract

The invention discloses a nitrogen and oxygen detection sensor chip. The sensor chip is formed by laminating four layers of substrates, the four layers of substrates sequentially comprise a first layer of substrate, a second layer of substrate, a third layer of substrate and a fourth layer of substrate from bottom to top, and the four layers of substrates are all made of zirconium oxide; a snakelike heating electrode is printed on the surface of the first-layer substrate; an insulating layer covering the heating electrode is printed at the bottom of the second-layer substrate, and a capacitance electrode (+) is printed at a top test end; the third-layer substrate sequentially comprises a first diffusion barrier, a first cavity, a second diffusion barrier and a second cavity; a capacitance electrode (-) is printed at a position, corresponding to the first cavity, of the bottom of the fourth-layer substrate, and a test electrode (-) is printed at a position, corresponding to the second cavity, of the bottom of the fourth-layer substrate; a test electrode (+) is printed on the top of the fourth layer of substrate, and the top of the test electrode (+) is covered with a porous protective layer. According to the invention, the structure of the nitrogen-oxygen detection sensor chip is simplified, the test loop is optimized, and the use of noble metal Au is avoided.

Description

Technical field [0001] The present invention relates to a nitrogen oxygen detection sensor chip, belonging to the field of gas sensor technology. Background [0002] With the updating of the national motor vehicle pollutant emission standards, the requirements for the toxic and harmful gas content of automobile exhaust emissions are becoming more and more stringent. Among them, nitrogen oxides are the main pollutants, and the emission standards are even more stringent. Conventional automotive electrolyte-type NOx gas sensors mainly include three working circuits, such as Figure 1 As shown, the three circuits are interrelated and influence each other, and the electrode material involves a variety of components such as Pt, PtAu, PtRh and so on. The complexity of the working circuit and the diversity of electrode material composition are the main difficulties and technical barriers of traditional sensors. [0003] as Figure 1 As shown, when this type of sensor is working, it is nece...

AI Technical Summary

Problems solved by technology

When the sensor works, the external electrode and the reference electrode are shared, the applied voltage is correlated with each other, there are many types of test parameters, the circuit is complex, and the influencing factors are changeable

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