Formation method of semiconductor structure

A semiconductor and gate structure technology, applied in the field of semiconductor structure formation, can solve the problems of FinFET performance to be improved, and achieve the effects of improving carrier mobility, preventing stress release, and improving performance

Pending Publication Date: 2022-06-21
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the performance of current FinFETs still needs to be improved

Method used

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  • Formation method of semiconductor structure
  • Formation method of semiconductor structure
  • Formation method of semiconductor structure

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Embodiment Construction

[0029] It can be known from the background art that the performance of FinFETs still needs to be improved at present.

[0030] According to the analysis, taking PMOS as an example, in FinFET, the material of the fin is SiGe, which can provide compressive stress to the channel of the PMOS device, thereby improving the mobility of carriers.

[0031] In the process of forming the semiconductor structure, a fin cut process is usually performed, and after the fin part is formed, the fin part at the unneeded position is cut and removed in the fin cut process. However, performing the fin cutting process is likely to cause stress relief in the fins, which in turn leads to a poor effect of improving carrier mobility.

[0032] One method is to cut and remove the fins at unneeded positions after forming the dummy gate structure, the source and drain doped regions in the fins on both sides of the dummy gate structure, and the interlayer dielectric layer.

[0033] Although this approach c...

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Abstract

The invention discloses a forming method of a semiconductor structure. The forming method comprises the following steps: providing a substrate, a pseudo gate structure, a source-drain doped region and an interlayer dielectric layer; removing the pseudo gate structure in the isolation region to form an isolation opening; performing first ion doping on the fin part below the isolation opening to form an isolation doped region, wherein the doping type of the isolation doped region is different from that of the source-drain doped region; filling an isolation structure in the isolation opening; removing the residual pseudo gate structure to form a gate opening; a gate structure is formed in the gate opening. According to the embodiment of the invention, the isolation doped region with the doping type different from that of the source-drain doped region is formed, so that the doping concentration of inversion ions in the fin part of the isolation region can be improved, the potential barrier of a PN junction formed by the source-drain doped region and the fin part of the isolation region is correspondingly improved, conduction current is prevented from being generated in the fin part of the isolation region when the device works, and the reliability of the device is improved. Therefore, the isolation between the fin parts in the isolation region and the fin parts in other regions is realized, and a fin cutting process is not needed, so that the fin parts are of a continuous structure, and stress release in the fin parts is avoided.

Description

technical field [0001] Embodiments of the present invention relate to the field of semiconductor manufacturing, and in particular, to a method for forming a semiconductor structure. Background technique [0002] In semiconductor manufacturing, with the development trend of VLSI, the feature size of integrated circuits continues to decrease. In order to adapt to the smaller feature size, the Metal-Oxide-Semiconductor Field-Effect Transistor , MOSFET) channel length is correspondingly shortened. However, with the shortening of the channel length of the device, the distance between the source and the drain of the device is also shortened, so the control ability of the dummy gate structure to the channel becomes worse, and the gate voltage pinch off the channel. The difficulty of the channel is also increasing, making the phenomenon of subthreshold leakage (subthreshold leakage), the so-called short-channel effect (SCE: short-channel effects), more likely to occur. [0003] Th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/336H01L29/06H01L29/78
CPCH01L29/66545H01L29/66803H01L29/0653H01L29/0638H01L29/785H01L29/7848H01L21/26513H01L21/823431H01L21/823481H01L21/823493H01L21/823437H01L21/76224H01L21/76237H01L29/66795
Inventor 李鹏翀施雪捷吴汉洙苏博
Owner SEMICON MFG INT (SHANGHAI) CORP
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