Production and reduction process of polycrystalline silicon

Abstract

The invention relates to a production and reduction process of polycrystalline silicon. A production reduction process of polycrystalline silicon comprises the following steps: (1) conveying trichlorosilane to an E1 module through a pipeline 1, heating the trichlorosilane to 60-100 DEG C, and conveying the trichlorosilane to a T1 module through a pipeline 2; hydrogen is conveyed to the E2 module through a pipeline 3, and is conveyed to the T1 module through a pipeline 4 after being heated to 100-180 DEG C; and (2) mixing the trichlorosilane and the hydrogen in the module T1, conveying the trichlorosilane and the hydrogen to a module E3 through a pipeline 5, conveying the trichlorosilane and the hydrogen to a module T2 through a pipeline 6 for thermal deposition, and recycling waste heat. According to the production reduction process of the polycrystalline silicon, heat is utilized through continuous coupling, heat energy of the polycrystalline silicon is utilized to the maximum extent, a whole set of process system with the lowest energy consumption is provided in the efficient reduction production link of the polycrystalline silicon, and a whole set of complete circulating energy-saving control scheme is provided.

Description

technical field [0001] The invention belongs to the technical field of polysilicon, and particularly relates to a production reduction process of polysilicon. Background technique [0002] The main traditional processes of polysilicon production in the world are: modified Siemens method, silane method and fluidized bed method. The improved Siemens method is the current mainstream production method. The advantages of this method are significant energy saving and consumption reduction, low cost, good quality, comprehensive utilization technology, no pollution to the environment, and obvious competitive advantages. [0003] Improve the control of polysilicon reduction production process in the process of polysilicon production by improved Siemens process, reflecting the key points of technology, cost and quality control in the entire polysilicon production process, including feed temperature, feed formula of high-purity TCS, waste heat recovery and utilization, etc. Control po...

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Problems solved by technology

[0006] The purpose of the present invention is to provide a polysilicon production and reduction process, which can effectively solve the problems of high energy consumption, poor heat energy utilization, poor energy recovery, and low yield when large or super-large reduction furnaces are used in the polysilicon reduction production process. Stepwise utilization and treatment of waste heat form a complete set of process system

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