Silicon MEMS resonator and method for realizing frequency drift self-compensation by piezoresistive heat of silicon MEMS resonator body
A frequency drift and resonator technology, applied in impedance networks, electrical components, etc., can solve the problems of thermal conduction delay, complex equipment, and large power consumption of compensation methods, achieve a large frequency compensation range, avoid control delays, and reduce power loss. Effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0039]The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0040] In the description of the present invention, it is to be understood that the terms "comprising" and "comprising" indicate the presence of the described features, integers, steps, operations, elements and / or components, but do not exclude one or more other features, The existence or addition of a whole, step, operation, element, component, and / or a collection thereof.
[0041] It should also be understood that the terminology used in th...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com