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Ceramic slurry for preparing porous layer as well as preparation method and application of ceramic slurry

A technology of ceramic slurry and porous layer, applied in the field of piezoelectric ceramics, can solve the problems of affecting the service life and easy to produce cracks, and achieve the effect of increasing the service life, reducing the influence of stress, and bonding firmly

Active Publication Date: 2022-08-09
SUZHOU YINGUAN SEMICONDUCTOR TECHNOLOGY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The main purpose of the present invention is to provide a ceramic slurry for preparing a porous layer and its preparation method and application, so as to solve the problem in the prior art that cracks are easily generated during the working process of piezoelectric ceramic devices and affect the service life

Method used

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  • Ceramic slurry for preparing porous layer as well as preparation method and application of ceramic slurry
  • Ceramic slurry for preparing porous layer as well as preparation method and application of ceramic slurry
  • Ceramic slurry for preparing porous layer as well as preparation method and application of ceramic slurry

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preparation example Construction

[0042] According to another typical embodiment of the present application, there is provided a method for preparing a ceramic slurry as described above, the preparation method comprising: step S1, mixing a solvent, a plasticizer, a dispersant and a thixotropic agent, Obtaining a ball milling solvent; Step S2, mixing the ball milling solvent and solid powder, and ball milling to obtain a mixed slurry; Step S3, filtering the mixed slurry through a screen to obtain a sieved slurry; Step S4, grinding the sieved slurry , homogenized to obtain ceramic slurry.

[0043] The piezoelectric ceramic slurry obtained by the above preparation method uses a multi-component solvent to widen the boiling point of the solvent, so that the solvent in the slurry can be uniformly and slowly volatilized during sintering, so that the combination of the slurry and the matrix is ​​more effective. It is firm, avoiding the concentration of the boiling point of the slurry of the single-component solvent, a...

Embodiment 1

[0054] The piezoelectric ceramic paste of this embodiment is according to figure 1 The preparation was carried out as shown in the schematic diagram of the preparation flow.

[0055] First, take 30 g of terpineol, 40 g of butyl carbitol, 3 g of tributyl citrate, 7 g of butyl benzyl phthalate, 3 g of polyethylene glycol (molecular weight 400, Aladdin, the same below), 3 g of ethyl Cellulose (45-55mpa.s, 5% in tolutne:isopropanol 80:20, Aladdin, the same below) 5g, triethanolamine 7g, hydrogenated castor oil (H196306, Aladdin, the same below) 5g, add the above materials to a beaker Mix in medium, heat and stir in a water bath, the temperature of the water bath is 85°C, until the solid matter is completely dissolved, and then slowly stir for 2 hours to obtain a ball milling solvent.

[0056]The solid powder is selected from the same material as the piezoelectric ceramic matrix, specifically the PZT piezoelectric material produced by Shanghai Naiou Nano Technology Co., Ltd., and ...

Embodiment 2

[0059] Take 30 g of terpineol, 45 g of butyl carbitol, 1 g of tributyl citrate, 4 g of benzyl butyl phthalate, 5 g of polyethylene glycol, 3 g of ethyl cellulose, 7 g of triethanolamine, and 5 g of hydrogenated castor oil. , add the above materials into a beaker and mix, heat and stir in a water bath, the temperature of the water bath is 85 ° C, until the solid material is completely dissolved, and then slowly stir for 2 hours to obtain a ball milling solvent.

[0060] The modified piezoelectric ceramic material is selected, specifically, 1% wt copper oxide is doped in the piezoelectric ceramic matrix material, and the piezoelectric ceramic matrix material is PZT-PMN piezoelectric ceramic material. The sintering of the modified piezoelectric ceramic material The temperature is 80 °C lower than the sintering temperature of the piezoelectric ceramic matrix material. According to the ratio of ball milling solvent: solid powder 60%: 40%, add the material to the ball mill jar, and a...

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Abstract

The invention provides ceramic slurry for preparing a porous layer as well as a preparation method and application of the ceramic slurry. The ceramic slurry comprises a dissolving component and solid powder, and the weight ratio of the dissolving component to the solid powder is 2: 3-3: 2; wherein the dissolving component comprises a multi-component solvent, a plasticizer, a dispersing agent and a thixotropic agent, and the proportion of the multi-component solvent in the dissolving component is 80wt%-90wt%; the solid powder is a modified piezoelectric ceramic material and / or a piezoelectric ceramic material composition; the modified piezoelectric ceramic material comprises a low-temperature sintered doped modified piezoelectric ceramic material with the sintering temperature lower than that of a piezoelectric ceramic matrix material, and the piezoelectric ceramic material composition comprises the piezoelectric ceramic matrix material and a grain growth aid. The ceramic slurry can be firmly combined with a matrix, the fracture toughness of a formed coating is lower than that of the matrix, and when tensile stress is generated in the matrix, cracks are generated in a slurry coating (stress reduction layer) area firstly, so that the stress influence on the ceramic matrix is reduced.

Description

technical field [0001] The present invention relates to the field of piezoelectric ceramics, in particular, to a ceramic slurry for preparing a porous layer and a preparation method and application thereof. Background technique [0002] With the development of electronic technology, piezoelectric ceramic products have received more and more attention in many fields, especially piezoelectric actuator products, which have good stiffness, linearity and resolution, and can be used in high vacuum environments It is widely used in precision mechanics and mechanical engineering, life sciences, medicine and biology, pneumatic / hydraulic valves, nano-positioning / high-speed switches and active, adaptive optics and other fields. Piezoelectric micro-actuator products use the inverse piezoelectric effect of piezoelectric technology, which is made of piezoelectric ceramics and multi-layer internal electrodes co-sintered. In order to prevent the piezoelectric ceramics from inducing the mig...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B41/87C04B35/632C04B35/626C04B35/499C04B35/491
CPCC04B41/5041C04B41/5051C04B41/87C04B41/009C04B35/632C04B35/626C04B35/491C04B35/499C04B35/00C04B41/4535C04B41/0072
Inventor 连子龙许良
Owner SUZHOU YINGUAN SEMICONDUCTOR TECHNOLOGY CO LTD