Narrow-pitch connector, electrostatic actuator, piezoelectric actuator, ink-jet head, ink-jet printer, micromachine, liquid crystal panel, and electronic apparatus
A technology of connectors and inkjet heads, which is applied in the direction of assembly of printed circuits, connections, and conductive connections of electrical components. Effect of large contact area and improved bonding strength
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[0115] Embodiment 1
[0116] figure 1 It is a front view showing the connector 20 for a narrow pitch according to the first embodiment and the terminal portion of a connection object 26 connected to the connector, figure 2 is along figure 1 Side view seen in the direction of arrow A.
[0117] Such as figure 1 As shown, the narrow-pitch connector 20 according to the first embodiment has a form in which the metal wiring 24 is formed on the surface of the substrate 22 .
[0118] The substrate 22 is made of rectangular single crystal silicon, and is manufactured by dicing a semiconductor wafer into a grid shape. Then, a plurality of metal wirings 24 are formed across the substrate 22 on the surface thereof. Then, at one end of the metal wiring 24, that is, on the edge portion 22A of the substrate 22, a terminal electrode 30 that can overlap with the terminal electrode 28 provided on the connection object 26 (the pitch of the terminal electrode 30 is the same as that of th...
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