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Preparation method of barium strontium titanate medium target

A technology of barium strontium titanate and medium, which is applied in the field of microwave integrated circuits, can solve the problems of difficult thermal stability and unsatisfactory effect, and achieve the effect of favorable compatibility and improved thermal stability

Inactive Publication Date: 2007-04-25
NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it is difficult to substantially improve the thermal stability of the target through general process improvement. At present, the main methods are to improve the uniformity of components, molding and sintering processes, strengthen annealing treatment or reduce the size of the target, etc., but these methods The final results are not ideal, and the problem cannot be completely solved

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Embodiment 1: Making Ba of φ90mm×5mm 0.7 Sr 0.3 Tio 3 Target, where (NH 4 ) 2 CO 3 The additive is 5% molar ratio.

[0022] Process steps:

[0023] 1. According to the molecular formula Ba 0.7 Sr 0.3 Tio 3 The molar ratio of the target material is prepared, and it is ground into an ultrafine powder with a particle diameter of ≤1 micron, which is combined by molding and 1200°C for 2 hours at a high temperature, and then crushed and ground into an ultrafine powder with a particle diameter of ≤1 micron. Repeat the above steps once.

[0024] 2. According to 5% molar ratio (NH 4 ) 2 CO 3 Grind into fine powder with a particle diameter of ≤5 microns, mix it into the above-mentioned matrix powder, mix it evenly and press it, and sinter at 1250°C for 4 hours to finally make a φ90mm×50mm strontium barium titanate target with dense pores.

Embodiment 2

[0025] Embodiment 2: Making Ba of φ90mm×5mm 0.7 Sr 0.3 Tio 3 Target, where (NH 4 ) 2 CO 3 Additive is 5% molar ratio, Sb 2 o 3 The additive is 0.02% molar ratio.

[0026] Process steps:

[0027] 1. According to the molecular formula Ba 0.7 Sr 0.3 Tio 3 The molar ratio of the target material is prepared, and it is ground into an ultrafine powder with a particle diameter of ≤1 micron. After molding and 1200°C, 2 hours of high-temperature pre-sintering, it is crushed and ground again into an ultrafine powder with a particle diameter of ≤1 micron. Repeat the above steps once.

[0028] 2. According to 5% molar ratio (NH 4 ) 2 CO 3 and 0.02% mol ratio Sb 2 o 3 Grind into fine powder with a particle diameter of ≤5 microns, mix it into the above-mentioned matrix powder, mix it uniformly and press it, and sinter at 1250°C for 4 hours at a high temperature to finally make a φ90mm×50mm strontium barium titanate target with dense pores.

Embodiment 3

[0029] Embodiment 3: Making Ba of φ90mm×5mm 0.7 Sr 0.3 Tio 3 Target, where (NH 4 ) 2 CO 3 Additive is 30% molar ratio, Sb 2 o 3 The additive is 0.1% molar ratio.

[0030] Process steps:

[0031] Process is with embodiment 2. But (NH 4 ) 2 CO 3 Additive is 30% molar ratio, Sb 2 o 3 The additive content is 0.1% molar ratio.

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Abstract

The invention adds little for foaming agent or foaming aid into the raw material for preparing target, which can generate bubble averagely without remained dirt in the burning course, and generate a great deal of micro holes in the final product, target with the micro hole structure can effectively absorb and eliminate internal stress caused by the serious magnetron sputtering heating condition, so that its heat stability is increased remarkably.

Description

technical field [0001] The invention belongs to the technical field of electronic ceramics, and is mainly used in microwave integrated circuit occasions requiring high dielectric constant, low loss and good stability. Background technique [0002] Ferroelectric thin film materials have good properties such as ferroelectricity, piezoelectricity, pyroelectricity, electro-optic and nonlinear optics. It can be widely used in the fields of microelectronics, optoelectronics, integrated optics and microelectromechanical systems. It is one of the frontiers and hotspots of current high-tech research. [0003] Among them, the barium strontium titanate dielectric material is one of the most researched varieties at present. It has excellent dielectric, pyroelectric properties, nonlinearity, high breakdown voltage, and no fatigue in the paraelectric phase. The Curie point can be adjusted by changing the composition. It has been widely favored by people and has become one of the most pro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/465C04B35/468C04B35/47
Inventor 林立强朱健吕振中戴精武
Owner NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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