Apparatus and process of producing electronics level high purity hydrochloric acid

A technology of electronic chemicals and high-purity hydrochloric acid, which is applied in the field of production technology and production equipment of electronic chemicals high-purity hydrochloric acid, can solve the problems of low output rate, difficulty in scale-up, high energy consumption, etc., and achieve high output rate , large-scale production, and low energy consumption

Inactive Publication Date: 2007-07-18
BEIJING INST OF CHEM REAGENTS
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Problems solved by technology

(1) This method has resistance wire tube heating, which consumes a lot of energy. The scale inside the tube will affect the heat conduction efficiency due to the long-term heating on the inner surface, and it is very easy to cause danger.
(2) Low output rate
Crude hydrochloric acid is heated in the tower kettle to form an azeotrope of about 20.2% (the ratio of hydrogen chloride and water is constant) at 108.5°C. In continuous production, the raw materials are continuously added to the tower, and the raffinate is also continuously discharged. The hydrogen chloride in the discharged raffinate is The content is nearly 20%, and the output rate is only about 60%. The discharged residual liquid causes environmental pollution and also brings great burden to environmental protection facilities.
(3) It is difficult to form a large-scale production by rectification method
The material used in the rectification equipment is glass or quartz, and the heating method determines the scale of the equipment. Most enterprises produce multiple sets of small equipment, and there are few operators, which is a potential hidden danger to safety production.

Method used

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  • Apparatus and process of producing electronics level high purity hydrochloric acid
  • Apparatus and process of producing electronics level high purity hydrochloric acid

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Embodiment Construction

[0041] The specific embodiment of process of the present invention is as follows

[0042] The pressure of hydrogen chloride gas is 0.15MPa, measured by mass flow meter ZL-01, and connected with the tee through the regulating valve ZQ-01; the pressure of nitrogen gas is 0.15MPa and connected with the tee; hydrogen chloride gas and nitrogen are mixed in the tee Enter the purification tower T-1. The coconut shell modified activated carbon is filled in the tower T-1. The activated carbon can remove oil, low-carbon organic compounds and metal impurities of iron and copper in the raw gas. The working temperature of the tower is It should be lower than 35°C, otherwise the impurities adsorbed by activated carbon will be decomposed and enter the next stage, or even the absorption tower will seriously affect the product quality;

[0043] Connections from tower T-1 to tower T-6 are made of glass, quartz or polytetrafluoroethylene; due to the strict requirements for high-purity hydrochlor...

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Abstract

The present invention relates to gas absorbing process of producing high purity hydrochloric acid and corresponding production apparatus. By means of the method and apparatus of the present invention, high purity hydrochloric acid as one kind of electronic chemical may be produced directly. The present invention solves the difficult problem of purifying hydrogen chloride gas and realizes the large scale production of high purity hydrochloric acid via gas absorbing process. The product has metal impurity and anion contents meeting the requirement as MOS grade, BV-III grade product standard for VLSI production.

Description

technical field [0001] The invention relates to a production method and a production device of electronic chemical high-purity hydrochloric acid. The electronic chemical high-purity hydrochloric acid produced by it is mainly used in the production of integrated circuits in the microelectronics industry, and can also be used in the production of reagent grade hydrochloric acid. Background technique [0002] At present, the production technology mainly used in the production of high-purity hydrochloric acid for electronic chemicals is rectification. This method has the disadvantages of high energy consumption, low output rate, large waste liquid discharge, and serious environmental pollution. [0003] Most of the methods for producing high-purity hydrochloric acid now are rectification. (1) This method has resistance wire tube heating, which consumes a lot of energy. The internal surface of the tube is heated for a long time to produce scale, which affects the heat transfer e...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B7/01C01B7/07
Inventor 杨晓虹杨长青邹德强
Owner BEIJING INST OF CHEM REAGENTS
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