Silica combined porous SiN ceramic with high strength and low dielectric constant and its prepn process
A technology of porous ceramics and silica, applied in the field of porous ceramics, can solve the problems of increasing the preparation cost and achieve the effects of controllable porosity, high porosity and strength, low dielectric constant and loss
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[0028] The present invention will be further described through specific implementation below, but the present invention is by no means limited to the embodiments. The process embodiment is shown in the table below:
[0029] implement
example
Si 3 N 4 (g)
SiO 2 (g)
(g)
Phenolic
resin
(g)
Silicon ball
mill
(g)
(g)
Force (MPa)
Sintering temperature
degree(℃)
insulation
time
(h)
1
100
0
0
4
200
150
30
1300
4
2
76
24
0
4
200
150
30
1200
4
3
81
19
0
4
200
150
30
1400
4
4
83
17
0
4
200
150
30
1500
4
5
84
16
0
4
200
150
30
1300
0....
PUM
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Abstract
Description
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