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Method for forming inorganic solid electrolyte film

A technology of electrolyte film and inorganic solid, which is applied in the field of forming inorganic solid electrolyte film, and can solve the problems of not showing ionic conductivity, undisclosed or suggested protective layer ionic conductivity, etc.

Inactive Publication Date: 2002-07-17
SUMITOMO ELECTRIC IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, such protective layers formed by plasma-assisted deposition techniques also have the problem of not exhibiting sufficiently high ionic conductivity
This US patent does not disclose or suggest any technique to enhance the ionic conductivity of the shield

Method used

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Embodiment 1

[0038] On a quartz glass substrate, a 2 μm-thick inorganic solid electrolyte film was formed, and gold was vapor-deposited onto the film to form electrodes. The ionic conductivity of the resulting thin film was measured by this electrode. The evaluation of activation energy was performed with the following method, where the temperature dependence of ionic conductivity was determined from the measured temperature increase.

[0039] Tables 1 to 5 show the conditions and evaluation results of inorganic solid electrolyte thin film formation. Sample 0 was used for comparison, where the films were formed at room temperature without heat treatment. In the laser ablation method, the pressure is 2.66×10 -1 Pa(2×10 -3 Torr), the atmosphere was Ar gas, and a KrF excimer laser was used. During sputtering, the pressure is 1.33×10 1 Pa(1×10 -1 Torr) and an Ar gas atmosphere was used. In vacuum evaporation, the pressure is 1.33Pa (1×10 -2 Torr). In ion plating, the pressure is 6.65P...

Embodiment 2

[0048] A lithium metal thin film with a thickness of 10 μm was formed on a copper foil or leaf with a size of 100 mm×50 mm and a thickness of 10 μm by vacuum evaporation. On this lithium metal thin film, an inorganic solid electrolyte thin film having a thickness of 1 μm was formed. Alternatively, two sheets of lithium metal foils or leaves each having the same size as the copper foil or leaf and each having a thickness of 30 μm are bonded to each other. Inorganic solid electrolyte films can be formed on bonded lithium metal foils or leaves in a similar manner. Inorganic solid electrolyte films were formed under the same conditions as those of Samples 1-3, 5-7, 9-29 and 31-50, as shown in the above table.

[0049] Each base member having a lithium metal thin film and an inorganic solid electrolyte thin film formed thereon was used as a negative electrode to prepare a lithium secondary battery. Each negative electrode, a separator of a porous polymer film, a positive electrod...

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Abstract

A method of producing a thin film of an inorganic solid electrolyte having a relatively high ionic conductance is provided. In the method, a thin film made of an inorganic solid electrolyte is formed, by a vapor deposition method, on a base member being heated. The thin film obtained through the heat treatment exhibits an ionic conductance higher than that of the thin film formed on the base member not being heated. The ionic conductance can also be increased through the steps of forming the thin film made of the inorganic solid electrolyte on the base member at room temperature or a temperature lower than 40 DEG C. and then heating the thin film of the inorganic solid electrolyte.

Description

Field of Invention [0001] The present invention relates to a method of forming an inorganic solid electrolyte thin film. More particularly, the present invention relates to methods of forming inorganic solid electrolyte thin films suitable for use in electrodes for lithium batteries. Background technique [0002] A solid secondary battery having a lithium thin film has been proposed. A method of producing such a solid-state battery is disclosed in Japanese Patent Unexamined Publication No. 62-44960. The method includes continuously forming a titanium disulfide thin film as a positive electrode and a LiO as an electrolyte on a substrate placed in a cluster ion beam evaporation system. 2 -Al 2 O 3 Thin film, and steps of Li thin film as negative electrode. [0003] An electrolyte material for solid batteries is disclosed in Japanese Patent Laid-Open No. 5-48582. The composition of the electrolyte material is aXbLi 2 S-Y, where X is selected from P 2 S 5 and SiS 2 , a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01B13/00B05D3/02B05D5/12C23C14/06C23C16/00C23C16/30H01M2/14H01M4/36H01M4/88H01M6/18H01M6/24H01M6/40H01M10/0562
CPCH01M4/134H01M4/525H01M2300/0068H01M2004/027H01M4/0407H01M10/052H01M4/04H01M6/18H01M4/366H01M6/24H01M2300/0088H01M10/0566Y02E60/122H01M4/131H01M6/40Y02E60/10H01M4/48
Inventor 久贝裕一太田进启
Owner SUMITOMO ELECTRIC IND LTD
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