Method for producing electrophoretic microchip

A production method and microchip technology, applied in the direction of material analysis, measuring devices, instruments, etc. through electromagnetic means, can solve the problems of unclear surface characteristics, low temperature resistance, difficulty in bonding quartz glass, etc., and meet the technological conditions Easy to meet, flat inner wall, simplified sintering process

Inactive Publication Date: 2002-08-21
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Claims
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AI Technical Summary

Problems solved by technology

Quartz glass not only has good micro-processing performance, but also has good heat dissipation, light transmission and insulation properties, and the inner wall characteristics of the pipe are similar to those of conventional capillaries, so it is easy to handle, so it is the most used material, but the bonding of quartz glass The method is quite difficult, and there is no detailed report in the literature
The advantage of organic high polymer is that it is cheap, the cost of mass production is low, the pipeline network can be made by compression molding technology, and it can be heat-sealed or bonded with adhesive; its disadvantage is that the surface characteristics are not very clear, and it is not resistant to high temperature

Method used

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  • Method for producing electrophoretic microchip
  • Method for producing electrophoretic microchip
  • Method for producing electrophoretic microchip

Examples

Experimental program
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Embodiment 1

[0050] Example 1 Single lane capillary electrophoresis microchip

[0051] Consider the following parameters when designing the chip: the width and length of the injection lane and the separation lane, the shape of the injection lane and the separation lane, etc. The pipeline graphics in this example are as follows: image 3 shown. Make the designed pipeline pattern into a mask plate for further photolithographic transfer to the substrate.

[0052] The fabrication process of electrophoretic microchips such as figure 1 shown, including the following steps:

[0053](1) Cut the quartz sheet into a certain size such as 5cm×3cm according to the requirements. After cleaning, use N 2 Air-dried, pre-baked at 80°C for 10 minutes; after that, a layer of metal chromium was plated on the surface as a sacrificial layer 02 ( figure 1 step 1);

[0054] (2) Then apply a layer of photoresist 03 (Positive Resist #1813) on the glue machine, rotate at 3000 rpm, bake at 80°C for 15 minutes (...

Embodiment 2

[0061] Example 2 Multi-lane array capillary electrophoresis microchip

[0062] Consider the following parameters during the design of the multi-lane array capillary electrophoresis microchip made in this embodiment: the number of swimming lanes, the layout of the swimming lanes, the length and width of the swimming lanes, the spacing and shape of the swimming lanes, and the reasonable distribution of the liquid storage tanks, etc., design graphics such as Figure 5 shown. Make the designed pipeline pattern into a mask plate for further photolithographic transfer to the substrate.

[0063] The manufacturing process is the same as in Embodiment 1, and the completed chip is as follows: Image 6 shown.

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Abstract

The production process of electrophoretic microchip incldues the steps of: designing electrophoretic microchip based on functional requirement and corresponding technological conditions while considering the parameters of sample inlet electrophoretic channel and separating electrophoretic channel width and length, pipe shape and interval, and making mask based on the designed microchip figure; and the making electrophoretic microchip through selecting high quality quartz as substrate, wet photoetching to form notches and other patterns in the substrate and linkage to form microtube network to constituted electrophoretic microchip. The present invention has the advantages of reliable protection in wet etching process, simple linkage process combining pre-linkage and sintering, etc.

Description

technical field [0001] The invention relates to electrophoresis, in particular to a method for making an electrophoresis microchip. Background technique [0002] Capillary electrophoresis is a new separation and analysis technique, which has been widely used in the fields of life science, biotechnology, clinical medicine, pharmacy and environmental protection due to its advantages of rapidity, high efficiency and low reagent consumption. In recent years, with the development of biochip technology and various micro-assembly technologies, capillary electrophoresis microchip technology based on microelectromechanical systems technology (MEMS) has emerged. Etch the micropipeline network and other functional units to form a fast, efficient, and low-consumption micro-analysis device that integrates sampling, reaction, separation, and detection. Its key technology involves not only the knowledge of micro-processing technology, chip material properties, signal detection, acquisitio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/447
Inventor 赵建龙金庆辉陈继锋徐元森
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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