Carbon nano tube film micromechanical infrared detector

A carbon nanotube thin film, infrared detector technology, applied in the field of infrared detectors, can solve the problems of large volume, low sensitivity, inability to achieve performance and the like
CN1385359AInactive Publication Date: 2002-12-18XI AN JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
XI AN JIAOTONG UNIV
Publication Date
2002-12-18
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The present invention discloses a carbon nano tube film micromachinery infrared detector with simple structure, high resolution, broad spectrum respose range, high sensitivity and low cost, and is characterized by that it includes micromachinery with a certain backing material, pick-up circuit and micromachinery resonator on which a layer of carbon nano tube film as light emission absorbing material is grown. The absorption coefficent ela of carbon nano tube film to infrared radiation can be up to 0.98, so that it possesses high sensitivity and small noise, and the detection power of said detector also can be raised. The microresonator can be made up by using MEMS process, can be produced in alarge scale.
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Description

[0001] 1. Field

[0002] The invention relates to an infrared detector, in particular to a carbon nanotube film micromechanical infrared detector on which a micromachine is made on a substrate of a certain material and a carbon nanotube film is grown on it. 2. Background technology

[0003] Infrared detection plays an important role in modern science. Various infrared detectors are widely used in many aspects such as imaging, tracking, guidance, reconnaissance, early warning, remote sensing, weak signal detection, radiation measurement, automatic control and laser detection.

[0004] Due to the different detection mechanisms, there are two main types of infrared detectors: photon detectors and thermal detectors. Common photon detectors include photoelectron emission detectors, photoconductive detectors, photovoltaic detectors, and photomagnetoelectric detectors. Common thermal detectors include thermistor bolometers, radiance thermocouples and thermopiles, pneumatic detectors...

Claims

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