Carbon nano tube film micromechanical infrared detector

A carbon nanotube thin film, infrared detector technology, applied in the field of infrared detectors, can solve the problems of large volume, low sensitivity, inability to achieve performance and the like

Inactive Publication Date: 2002-12-18
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The disadvantages of pyroelectric detectors are: 1. Due to the limitation of materials, the sensitivity is low
2. Larger volume
3. At higher frequencies, since the dielectric loss increases with frequency, it is far from achieving ideal performance
4. Higher cost

Method used

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  • Carbon nano tube film micromechanical infrared detector
  • Carbon nano tube film micromechanical infrared detector
  • Carbon nano tube film micromechanical infrared detector

Examples

Experimental program
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Embodiment

[0021] Embodiment: Refer to Fig. 2 and Fig. 3, Fig. 2 is a structural diagram of a carbon nanotube thin film silicon micro-cantilever beam resonator, including a semiconductor base material 1 and a carbon nanotube thin film 2 grown thereon, and a pick-up circuit 3 . Figure 3 is a schematic diagram of the overall structure of a carbon nanotube thin-film silicon micro-cantilever infrared detector, including a base 4, a radiation window 5, a power supply 6, a power supply connection 7, a power supply connection 8, and an output signal connection 9 and an output signal connection 10.

[0022] Micromachine 1 refers to micromechanical resonant devices, which can be microcantilever beams, microbridges, and micromembranes (square membranes or circular membranes), etc.

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Abstract

The present invention discloses a carbon nano tube film micromachinery infrared detector with simple structure, high resolution, broad spectrum respose range, high sensitivity and low cost, and is characterized by that it includes micromachinery with a certain backing material, pick-up circuit and micromachinery resonator on which a layer of carbon nano tube film as light emission absorbing material is grown. The absorption coefficent ela of carbon nano tube film to infrared radiation can be up to 0.98, so that it possesses high sensitivity and small noise, and the detection power of said detector also can be raised. The microresonator can be made up by using MEMS process, can be produced in alarge scale.

Description

[0001] 1. Field [0002] The invention relates to an infrared detector, in particular to a carbon nanotube film micromechanical infrared detector on which a micromachine is made on a substrate of a certain material and a carbon nanotube film is grown on it. 2. Background technology [0003] Infrared detection plays an important role in modern science. Various infrared detectors are widely used in many aspects such as imaging, tracking, guidance, reconnaissance, early warning, remote sensing, weak signal detection, radiation measurement, automatic control and laser detection. [0004] Due to the different detection mechanisms, there are two main types of infrared detectors: photon detectors and thermal detectors. Common photon detectors include photoelectron emission detectors, photoconductive detectors, photovoltaic detectors, and photomagnetoelectric detectors. Common thermal detectors include thermistor bolometers, radiance thermocouples and thermopiles, pneumatic detectors...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/02G01J1/04
Inventor 刘君华梁晋涛朱长纯韩建强
Owner XI AN JIAOTONG UNIV
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