Doping method used in vertical pulling silicon single crystal preparation and its installation

A technology of Czochralski silicon and single crystal, which is applied in the direction of single crystal growth, chemical instruments and methods, self-melt liquid pulling method, etc., to achieve the effects of improving doping efficiency, easy availability of raw materials and simple structure
CN1414147AInactive Publication Date: 2003-04-30GRINM SEMICONDUCTOR MATERIALS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
GRINM SEMICONDUCTOR MATERIALS CO LTD
Publication Date
2003-04-30
Estimated Expiration
Not applicable · inactive patent

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Abstract

A process for doping the monosilicon in its vertical pulling procedure includes such steps as loading the element to be doped in the internal cylinder of doping apparatus, lowering the doping apparatus to the level of molten monosilicon, rotating quartz crucible to voltilize all said element, installing the seed crystal with particular crystal orientation, and pulling. It has high doping efficiency.
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Description

1. Technical field

[0001] The invention relates to a doping process and equipment in single crystal growth by self-melting pulling method, more specifically to a doping method and equipment for producing single crystal silicon rods. 2. Background technology

[0002] Most semiconductor silicon single crystals are produced by the Czochralski method. In this method, polysilicon is put into a quartz crucible, heated and melted, and then the molten silicon is slightly cooled, given a certain degree of supercooling, and a silicon single crystal (called a seed crystal) with a specific crystal orientation is placed In contact with the molten silicon, by adjusting the temperature of the melt and the upward lifting speed of the seed crystal, when the seed crystal grows to a diameter close to the target, increase the lifting speed to make the single crystal grow with a nearly constant diameter. At the end of the growth process, when the silicon melt in the crucible has not completely ...

Claims

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