Formation of a corrosion resistant layer on metallic thin films by nitrogen exposure

Abstract

A process is described for fabricating magnetic transducers with metallic thin films with a corrosion resistant surface produced by exposing the thin films to a nitrogen in a plasma chamber. The exposure to the nitrogen is believed to increase the corrosion resistance of the metallic thin films by causing nitrides to form in a thin surface region. In the preferred embodiment the thin film metals of a magnetic transducer are treated with the nitrogen after being cut from the wafer and lapped. Typical metals used in magnetic transducers are NiMn, FeMn, NiFe, cobalt, CoFe, copper. The films may be further protected by the addition of prior art protective layers such as carbon.

Description

technical field [0001] The present invention relates generally to thin films for use in magnetic memory devices, and more particularly to thin film manufacturing methods, and even more particularly to thin film manufacturing methods for improving the corrosion resistance of metal thin films. Background technique [0002] A typical head and disk system 10 in the prior art is shown in FIG. 1 . In operation, the magnetic transducer 20 is supported by the suspension 13 as it flies over the disc 16 . The magnetic transducer, commonly referred to as the "head" or "slider", consists of elements that perform the tasks of writing magnetic transitions (write head 23) and reading magnetic transitions (read head 12). Electrical signals received and emitted by the read and write heads 12 , 23 (collectively referred to as “magnetic transducer elements”) are transmitted along conductive paths (wires) 14 , which are connected to or embedded in the suspension 13 . Typically there are two e...

AI Technical Summary

Problems solved by technology

Improved performance requires smaller sensor-to-media spacing and thinner coatings that result in reduced corrosion reliability

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