Method for preparing carbon nanotube on glass substrates

A carbon nanotube and glass substrate technology, applied in the field of carbon nanotube field emission cathode preparation, can solve the problems of poor quality, unsatisfactory emission current size and emission uniformity, limiting practical application, etc. The effect of production costs

Inactive Publication Date: 2004-12-29
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In the direct growth method, the substrate temperature is generally required to reach 700 degrees Celsius, so silicon is often used as the substrate, which seriously limits its practical application.
Although glass is also used as a substrate to directly grow carbon nanotubes under 600 degrees, the quality of the growth is often poor, and the size of the emission current and the uniformity of the emission are not very ideal.

Method used

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  • Method for preparing carbon nanotube on glass substrates
  • Method for preparing carbon nanotube on glass substrates
  • Method for preparing carbon nanotube on glass substrates

Examples

Experimental program
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Effect test

Embodiment 1

[0016] The substrate is ordinary window glass, on which a calcium fluoride film with a thickness of 100 nanometers is deposited by electron beam evaporation, and then a nickel film with a thickness of about 10 nanometers is deposited, which is prepared by thermal decomposition chemical vapor deposition in a vacuum system carbon nanotubes. Acetylene is used as the gas, the pressure is about 100 Pa, and the substrate temperature is 400 degrees to obtain carbon nanotubes of good quality, and the substrate glass has no sign of softening.

Embodiment 2

[0018] The substrate is ordinary window glass, on which a layer of neodymium fluoride film with a thickness of 50 nanometers is deposited by electron beam evaporation method, and then a layer of nickel film with a thickness of about 20 nanometers is deposited, which is prepared by thermal decomposition chemical vapor deposition in a vacuum system carbon nanotubes. Acetylene is used as the gas, the pressure is about 100 Pa, and the substrate temperature is 500 degrees to obtain carbon nanotubes of good quality, and the substrate glass has no sign of softening.

Embodiment 3

[0020] The substrate is made of glass with a high softening point, on which a magnesium fluoride film with a thickness of 500 nanometers is deposited by electron beam evaporation, and then a layer of iron film with a thickness of about 100 nanometers is deposited. Preparation of carbon nanotubes. Acetylene was used as the gas, the pressure was about 200 Pa, and the substrate temperature was 650°C. Good quality carbon nanotubes were obtained, and the substrate glass showed no sign of softening.

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Abstract

The invention discloses a method for preparing carbon nanotube on glass substrates, in particular the preparation of carbon nanotube emission cathode, which comprises, using glass as substrate, depositing a fluoride film of II main group metals or rare-earth metals on the glass substrate, then depositing ferrum, cobalt, nickel, palladium or using the alloy film composing these material as catalyst, growing carbon nanotube on the film by utilizing the conventional growing technology, or first depositing a layer of ferrum, cobalt, nickel, palladium on the glass substrate or using the alloy film composing these material as catalyst, then depositing a fluoride film of II main group metals or rare-earth metals, then growing carbon nanotube on the film, wherein the substrate temperature during carbon nanotube growing is 400-650 deg. C.

Description

technical field [0001] The invention belongs to the technical field of carbon nanotube growth, in particular to the preparation of carbon nanotube field emission cathodes. technical background [0002] An important application of carbon nanotubes is to make field emission cathodes, which can be used in a variety of devices and devices that require electron flow, such as vacuum microwave tubes, electron accelerators, discharge tubes and flat panel display devices. considered to be the most promising direction. At present, there are roughly two methods for making carbon nanotube field emission cathodes. One is to deposit a layer of iron, cobalt, or nickel film on the substrate as a catalyst, and then directly grow carbon nanotubes, and can form iron, cobalt, or nickel films. Cobalt and nickel films have the same pattern. Another method is to make the required pattern on the substrate by printing, electroplating and other methods with the prepared carbon nanotube powder. Bot...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B31/02H01J1/304H01J9/02
Inventor 李德杰任延来朱丹
Owner TSINGHUA UNIV
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