Growth of ferroelectric thick films with films as seeds by liquid phase epitaxy

A technology of liquid phase epitaxy and ferroelectric thick film, which is applied in the direction of liquid phase epitaxy layer growth, crystal growth, chemical instruments and methods, etc., to achieve the effect of convenient operation, low cost and controllable orientation

Inactive Publication Date: 2005-02-23
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a new preparation method of liquid phase epitaxial growth ferroelectric material for the difficulties and deficiencies in the preparation process of the existing lead-based ferroelectric single crystal, that is, by depositing a highly oriented thin film on the substrate as Epitaxially grown seed crystals can obtain large-area, high-quality, sheet-like ferroelectric thick films, opening up new fields for the growth of thick films of ferroelectric materials

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] 1. According to the stoichiometric ratio of 0.91PbZn 1 / 3 Nb 2 / 3 o 3 -0.09PbTiO 3 Carry out the batching of oxide raw materials;

[0017] 2. Add absolute ethanol as the medium, mill in an agate ball mill jar for 2 hours, dry the powder, put it into an alumina crucible, and calcinate at 900°C for 4 hours;

[0018] 3. Grind the calcined block material in an agate mortar for 15 minutes, and uniformly mix the ground powder with 50wt% PZNT and 50wt% lead oxide, and then press the uniformly mixed powder into a circle of Φ25mm piece;

[0019] 4. Put the powder into a sealed crucible, and raise the temperature to 1150°C in 2 hours, and keep it warm for 1 hour at this temperature for foaming;

[0020] 5. Lower the temperature to 1050°C, put the magnesium oxide substrate coated with YBCO seed film from the top to carry out epitaxial growth of PZNT ferroelectric thick film, and the growth time is 1 second.

Embodiment 2

[0022] 1. According to the stoichiometric ratio of 0.67PbMg 1 / 3 Nb 2 / 3 o 3 -0.33PbTio 3 Carry out the batching of oxide raw materials;

[0023] 2. Add absolute ethanol as the medium, mill in an agate ball mill jar for 1 hour, dry the powder, put it into an alumina crucible, and calcine at 850°C for 8 hours;

[0024] 3. Grind the calcined block material in an agate mortar for 15 minutes, and uniformly mix the ground powder with 45wt% PMNT and 55wt% lead oxide, and then press the uniformly mixed powder into a circle of Φ25mm piece;

[0025] 4. Put the powder into a sealed crucible, and raise the temperature to 1180°C in 4 hours, and keep it warm for 2 hours at this temperature for foaming;

[0026] 5. Lower the temperature to 1050°C, put the strontium titanate substrate coated with the PZT seed film from the top for epitaxial growth, the growth time is 10 seconds, and the thickness of the PMNT film is several microns.

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PUM

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Abstract

In this method, the component of the plumbum magnesium acid-plumbum titanic acide (PMNT) or plumbum zincic niobium acid-plumbum titanic acid (PZNT) crystal growth is applied to process the blending of the oxide. Grinding and calcinating the confected powder material in the agate ball milling pot; mixing the calcinated powder material with the fluxing agent, plumbum oxide under the high temperature, dunking the material after a period of time, on the base plate with the germ film, the PZNT or PMNT thick film being produced. The simple technology, convenient operation extend the application of liquid phase epitaxy.

Description

technical field [0001] The invention relates to a method for using a seed film as a seed crystal liquid phase epitaxy (Liquid Phase Epitaxy, LPE for short) ferroelectric thick film. The highly oriented thin film obtained by various physicochemical methods acts as a seed crystal to control the epitaxial growth of the LPE process, thereby facilitating the growth mode of a layered, complete ferroelectric thick film. Background technique [0002] Lead-based ferroelectric materials have attracted widespread attention from scholars at home and abroad for their excellent piezoelectric and dielectric properties, and have been widely used in medical ultrasonic diagnostic equipment and naval sonar. At present, the annual output value of only B-type ultrasonic diagnostic and therapeutic instruments in the world is as high as 2 billion U.S. dollars, of which the material market is close to 200 million U.S. dollars, and lead zirconate titanate (Pb(Zr 1 / 2 Ti 1 / 2 )O 3 , referred to as P...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B19/00H01L41/39
Inventor 姚忻曾新华秦奋
Owner SHANGHAI JIAO TONG UNIV
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