Multiple electrode array and manufacturing method

A multi-electrode array and electrode technology, applied in the field of multi-electrode arrays, can solve the problems of non-productization, difficulty in manufacturing density, large damage to brain tissue, etc., and achieve easy implementation, omission of wire bonding process, reliability and mechanical strength. high effect

Inactive Publication Date: 2005-03-30
INSITUTE OF BIOPHYSICS CHINESE ACADEMY OF SCIENCES
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  • Abstract
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  • Application Information

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Problems solved by technology

[0003] In 1981, American scientist Kruger et al. used ceramic materials to fix multiple microelectrodes on a grid with a spacing of 250 microns to form a multi-electrode array. This method is inefficient, and the length and parallelism of electrodes are not easy to control.
Afterwards, various improved multi-electrode array manufacturing methods appeared. For example, the electrode array of Utah University uses a dicing knife to directly carve a plurality of electrode tips on a silicon substrate, and then makes finished products through processes such as insulation and wire bonding. The problem with the method is that the size of the electrode tip cannot be made too thin, and the electrode that is too thick will cause great damage to the brain tissue, and it is also difficult to manufacture a high-density multi-electrode array
In addition, there are planar integrated circuit manufacturing processes such as photolithography and ion sputtering to make sheet-like multi-electrodes, and then laminated to form a multi-electrode array, such as the electrode array of the University of Michigan in the United States, but this type of electrode array is in terms of comprehensive performance. Still needs to be improved, and it has not yet been commercialized

Method used

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  • Multiple electrode array and manufacturing method

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Embodiment

[0046] See Figure 1(a) ~ Figure 1(f) , take two brass sheets with a thickness of 0.05 mm, and laser-drill microholes in a 10×10 array with a hole diameter of 30 microns and a hole spacing of 200 microns. The two microhole array sheets 1 are horizontally separated by 1 mm and fixed. Take a steel wire 2 with a diameter of about 27 microns, straighten it and cut it into 100 steel wires 2 with a length of 30 mm, insert the steel wire 2 into the microwells of two microwell array sheets 1 by micromanipulation, and expose the tip by about 1 mm , and the rear end is exposed at the proper length. Immediately inject the newly prepared denture tray resin 3 into the space between the two microporous array sheets 1. After 20 minutes, the resin 3 solidifies, pull out the steel wire 2, peel off the two microporous array sheets 1, and modify the shape of the tray plastic block A 10×10 microwell array 4 with a pore diameter of about 25 microns, a pore depth of 1 mm, and 10×10 can be obtained....

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Abstract

A multi-electrode array is composed of a pinhole array, multiple right-angle electrodes made of metal wire and arranged in the vertical pinholes of pinhole array, and fixing resin on the top surface of pinhole array for fixing the horizontal parts of said electrodes.

Description

technical field [0001] The invention relates to multi-electrode array technology, in particular to a multi-electrode array manufacturing method. Background technique [0002] The multi-electrode array is formed by integrating multiple micro-electrodes on one substrate and implanted in the cerebral cortex, which can read the detailed information of the neuron group activity in the brain. In terms of basic neuroscience research, multi-electrode arrays have begun to become an important means of neural information detection. In terms of medical applications, multi-electrode arrays have become an interface for neuroscience-oriented medical applications. [0003] In 1981, American scientist Kruger et al. used ceramic materials to fix multiple microelectrodes on a grid with a spacing of 250 microns to form a multi-electrode array. This method is inefficient, and the length and parallelism of the electrodes are not easy to control. Afterwards, various improved multi-electrode array...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B5/00
Inventor 唐世明
Owner INSITUTE OF BIOPHYSICS CHINESE ACADEMY OF SCIENCES
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