Preparation method of optically homogeneous zirconia film
A zirconia and thin film technology, which is applied in the field of preparation of optically uniform zirconia thin films, can solve problems such as optical non-uniformity, and achieve the effects of wide application range, high adhesion, and elimination of factors of optical non-uniformity.
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Embodiment 1
[0035] The purpose of this example is to prepare an optically uniform zirconia film, and the refractive index of the sample at 600 nm is required to be between 1.91-1.95.
[0036] The specific preparation method of this example is: at room temperature, using ion beam auxiliary technology, the ion source is a domestic Hall-type auxiliary ion source, the equipment is a ZZSX800F coating machine, the distance between the ion source ion outlet and the fixture for placing the sample in the vacuum chamber is 40cm; Put the zirconia block into the crucible as the target; put the substrate cleaned by petroleum ether on the fixture, pump the vacuum to 3×10-3Pa, and turn on the ion source. The working gas of the ion source is high-purity oxygen with a concentration of 99.99%. , the gas flow rate is 16sccm; the average energy of the ion is selected as 100eV, and the beam density of the ion is selected as 160 microamperes / cm2. After the ion source works stably, the operation of the electron ...
Embodiment 2
[0038] The purpose of this example is to prepare an optically uniform zirconia film, and the refractive index of the sample at 500 nm is required to be between 1.95-1.97.
[0039] The preparation method of this embodiment is: at room temperature, using ion beam auxiliary technology, the ion source is a domestic Hall-type auxiliary ion source, the equipment is a ZZSX800F coating machine, and the distance between the ion source ion outlet and the clamp for placing the sample in the vacuum chamber is 40cm; Put the zirconia block into the crucible as the target; put the substrate cleaned by petroleum ether on the fixture, pump the vacuum to 3×10-3Pa, and turn on the ion source. The working gas of the ion source is high-purity oxygen with a concentration of 99.99%. , the gas flow rate is 16sccm; the average energy of the ion is selected as 180eV, and the beam density of the ion is selected as 160 microamperes / cm2. After the ion source works stably, the operation of the electron gun ...
Embodiment 3
[0041] The purpose of this example is to prepare an optically uniform zirconia film, and the refractive index of the sample at 500 nm is required to be between 1.95-1.97.
[0042]The preparation method of this embodiment is: at room temperature, using ion beam auxiliary technology, the ion source is a domestic Hall-type auxiliary ion source, the equipment is a ZZSX800F coating machine, the distance between the ion source ion outlet and the fixture for placing the sample in the vacuum chamber is 40cm; Put the zirconium block into the crucible as the target; put the substrate cleaned by petroleum ether on the fixture, pump the vacuum to 3×10-3Pa, and turn on the ion source. The working gas of the ion source is high-purity oxygen with a concentration of 99.99%. The gas flow rate is 16sccm; the average energy of the ions is selected as 100eV, and the beam density of the ions is selected as 120 microamperes / cm2. After the ion source works stably, the operation of the electron gun is...
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