Chemical gas-phase deposition for producing diamond thin filmon cutter with complex-formation

A chemical vapor deposition, diamond thin film technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, to achieve the effect of improving film growth rate, uniform distance, and increasing nucleation rate

Inactive Publication Date: 2006-08-16
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the problem of uneven diamond coating on complex-shaped tools, the present invention provides a chemical vapor deposition method for preparing diamond films on complex-shaped tools, so that it can effectively solve the problem of uniform diamond coating on complex-shaped tools

Method used

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  • Chemical gas-phase deposition for producing diamond thin filmon cutter with complex-formation

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Experimental program
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Effect test

Embodiment 1

[0018] Embodiment 1 Carbide drill bit

[0019] A diamond film with high uniformity was prepared with a cemented carbide drill as a substrate. The sample adopts high-precision hard alloy drill bit YG6 (WC-Co6%) (Φ3mm). The sample is Murakami solution (K 3 [Fe(CN) 6 ]:KOH:H 2 O=1:1:10) ultrasonic cleaning for 20 minutes, and then in the etching solution (H 2 SO 4 :H 2 o 2 =7:3) for 10s, then ultrasonically cleaned with acetone and coated with adhesion promoter and dried. Such as figure 1 As shown, the heating wire adopts a helical heating wire structure. The helical diameter of the helical heating wire mechanism is 9 mm, the pitch is 1 mm, and the height is 50 mm, which can just cover the required growth range. The spiral heating wire structure is placed vertically in the reaction chamber, the upper and lower brackets support the heating wire, and the upper and lower brackets are connected to the power supply. Place the pre-treated drill bit in the middle of the hot wi...

Embodiment 2

[0021]Embodiment 2 Hard alloy milling cutter

[0022] A diamond film with high uniformity was prepared with a cemented carbide milling cutter as a substrate. The sample adopts high-precision hard alloy milling cutter YG6 (WC-Co6%) (Φ2mm). The sample is Murakami solution (K 3 [Fe(CN) 6 ]:KOH:H 2 O=1:1:10) ultrasonic cleaning for 20 minutes, and then in the etching solution (H 2 SO 4 :H 2 o 2 =7:3) for 10s, then ultrasonically cleaned with acetone and coated with adhesion promoter and dried. Such as figure 1 As shown, the heating wire adopts a helical heating wire structure. The helical diameter of the helical heating wire mechanism is 8mm, the pitch is 1mm, and the height is 30mm, which can completely cover the required growth range. The spiral heating wire structure is placed vertically in the reaction chamber, the upper and lower brackets support the heating wire, and the upper and lower brackets are connected to the power supply. Place the pre-treated drill bit in ...

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Abstract

A chemical vapour deposition process to make the diamond film on the tool bit of the complex shape use the spiral heater structure based on the heater CVD plated diamond film. It put the tool bit into the inner of the spiral heater structure, the tool bit rotaries by the axis, so the distance between the parts of the tool bit and the heater and the concentration of the carbon source is uniform. It can assure the uniformity of the coating and the film of the substrate.

Description

technical field [0001] The invention relates to a method in the technical field of plating, in particular to a chemical vapor deposition method for preparing a diamond film on a tool with a complex shape. Background technique [0002] With the continuous development of chemical vapor deposition coating technology, CVD diamond coating technology can effectively coat complex-shaped tools, thereby improving tool durability, improving production efficiency and workpiece processing quality, and reducing production costs. The application prospect is extremely broad . Therefore, the development and application of diamond film tools with complex shapes is the real advantage of chemical vapor deposition diamond coating technology. However, there are many difficulties in the preparation of diamond-coated tools with complex shapes. The main problem is that the uniformity of the diamond film coated on the surface of complex shapes is very poor, and the coating thickness distribution on...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/27C23C16/513C23C16/52C23C16/02
Inventor 王勇马玉平孙方宏陈明张志明
Owner SHANGHAI JIAO TONG UNIV
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