Chemical gas-phase deposition for producing diamond thin filmon cutter with complex-formation

A chemical vapor deposition, diamond thin film technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, to achieve the effect of improving film growth rate, uniform distance, and increasing nucleation rate
CN1818131AInactive Publication Date: 2006-08-16SHANGHAI JIAO TONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI JIAO TONG UNIV
Publication Date
2006-08-16
Estimated Expiration
Not applicable · inactive patent

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Abstract

A chemical vapour deposition process to make the diamond film on the tool bit of the complex shape use the spiral heater structure based on the heater CVD plated diamond film. It put the tool bit into the inner of the spiral heater structure, the tool bit rotaries by the axis, so the distance between the parts of the tool bit and the heater and the concentration of the carbon source is uniform. It can assure the uniformity of the coating and the film of the substrate.
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Description

technical field

[0001] The invention relates to a method in the technical field of plating, in particular to a chemical vapor deposition method for preparing a diamond film on a tool with a complex shape. Background technique

[0002] With the continuous development of chemical vapor deposition coating technology, CVD diamond coating technology can effectively coat complex-shaped tools, thereby improving tool durability, improving production efficiency and workpiece processing quality, and reducing production costs. The application prospect is extremely broad . Therefore, the development and application of diamond film tools with complex shapes is the real advantage of chemical vapor deposition diamond coating technology. However, there are many difficulties in the preparation of diamond-coated tools with complex shapes. The main problem is that the uniformity of the diamond film coated on the surface of complex shapes is very poor, and the coating thickness distribution on...

Claims

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