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Combustible gas sensor preparing method

A gas sensor and semiconductor technology, applied in instruments, scientific instruments, measuring devices, etc., can solve problems such as fire and sensor explosion, and achieve the effects of good development prospects, low operating temperature and high sensitivity

Inactive Publication Date: 2006-11-22
WUHAN INSTITUTE OF TECHNOLOGY
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Problems solved by technology

The traditional gas sensor generally has a high working temperature (requires heating). When the concentration of combustible gas is high, it may cause the risk of explosion and fire due to the high temperature of the sensor. Lower the working temperature of the gas sensor to achieve room temperature gas detection. An important goal of the research

Method used

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Embodiment Construction

[0030] A kind of preparation method of combustible gas sensor, it comprises the steps: 1) the preparation of semiconductor gas sensor is (as figure 1 shown):

[0031] ①Using the magnetron sputtering coating method to plate a 3-10μm copper metal thin layer on a 1.5×3cm quartz glass substrate, and then using microfabrication technology, masking, photolithography, and corrosion methods to obtain an interdigitated layer on the glass substrate Microelectrode arrays (such as figure 2 shown), that is, the interdigitated microelectrode array electrode substrate; wherein the microelectrode line width is 3-10 μm, the gap width is 3-10 μm, the electrode line length is 10 mm, and the number of microelectrode pairs is more than 500 pairs;

[0032] ②Preparation of nano-TiO by organometallic alkoxide hydrolysis 2 Sol: add 13ml tetra-n-butyl titanate to 4ml isopropanol and mix evenly, slowly add the mixture dropwise to 120ml distilled water containing 2ml concentrated nitric acid, after th...

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Abstract

The related preparation method for fuel gas sensor comprises: 1) with fork micro-electrode array substrate as base, preparing nano semiconductor TiO2 film to obtain gas sensitive element (2); 2) arranging a UV lamp (1) above the film, fixing (1) and (2) in as shell (3) with air hole. This invention can improve sensor sensitivity and reduces work temperature.

Description

technical field [0001] The invention relates to a gas sensor, in particular to a preparation method of a combustible gas sensor. Background technique [0002] In recent years, the research and development of gas sensors has become more and more important due to the increasing requirements for the accuracy, performance and stability of gas sensors in the fields of industrial production, home security, environmental monitoring and medical treatment. Gas sensors are commonly used at present. The traditional gas sensor generally has a high working temperature (requires heating). When the concentration of combustible gas is high, it may cause the risk of explosion and fire due to the high temperature of the sensor. Lower the working temperature of the gas sensor to achieve room temperature gas detection. An important goal of the research. Contents of the invention [0003] The purpose of the present invention is to provide a method for preparing a combustible gas sensor which...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12G01N27/407
Inventor 林志东曾文
Owner WUHAN INSTITUTE OF TECHNOLOGY
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