Protection method and structure for ESD of compound semiconductor

Abstract

The related crystal-clad semiconductor element with electrostatic protective capacity to avoid ESD damage comprises: a part of compound semiconductor, and another part of ZnO plate for protection to form an over-voltage voltage-variable resistor with two electrodes combined and paralleled with the semiconductor electrodes. Usually, the electrodes of protection part are almost open with less leakage current; if coming static electricity, it forms a discharge loop for protection.

Description

technical field [0001] The invention relates to the field of electrostatic protection of compound semiconductor elements, and more particularly relates to a method for protecting compound semiconductor elements from electrostatic discharge damage and a flip-chip compound semiconductor element with electrostatic discharge protection capability. Background technique [0002] Compound semiconductor devices are often used as light-emitting devices, etc., and have to face the same problem of static electricity as other electronic devices. Generally speaking, a compound semiconductor device is often connected in parallel with a Zener diode or a nitro diode as an antistatic method, or a filter circuit may be connected in series. In addition, when the diodes are connected in parallel, the diodes of the same configuration but reversed can also improve the ability of electrostatic protection. [0003] In recent years, III-V compound semiconductor materials have attracted a lot of att...

AI Technical Summary

Problems solved by technology

[0010] To sum up, there is no document or invention patent that directly uses the ceramic zinc oxide element as the flip-chip substrate of the semiconductor element. Therefore, the inventor of this case tried to combine the two elements based on this idea. To solve overvoltage and anti-static protection, finally invented a III-V flip-chip semiconductor structure that protects compound semiconductors from electrostatic discharge damage

Images