Method and system for forming a film of material using plasmon assisted chemical reactions
A plasma and chemical reaction technology, applied in microstructure or nanostructure and its application fields, can solve the problems of film quality deterioration and achieve the effects of fast heat generation, high device yield, and good space control
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[0082] In order to verify the principle and operation of the present invention, we provide embodiments of the present invention in a chemical vapor deposition environment. These examples are only illustrative and should not limit the scope of the claims. Those of ordinary skill in the art should recognize many changes, improvements and substitutions. As background information, we provide information about traditional chemical vapor deposition and its applications related to the method and system of the present invention. One of the goals of this CVD study is to locally control nanostructures. Ferroelectric materials are ideal for non-volatile memory applications. However, there are challenges in manufacturing uniform nano-sized arrays of ferroelectric materials. Traditional CVD only provides a random deposition process, so it has limitations.
[0083] In this embodiment, the local heating of metal nanostructures (such as particles, wires or arrays on the substra...
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