Air table for conveying sheet material and conveyer with the same

A pneumatic workbench, thin-plate technology, applied in conveyors, conveyor objects, transportation and packaging, etc., can solve the problems of large ventilation resistance, small air flow, small floating amount, etc., to suppress air turbulence and achieve high reliability. sexual effect

Inactive Publication Date: 2007-04-18
NIPPON SEKKEI INDS +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, due to such air turbulence, foreign matter such as dust may easily adhere to the glass substrate.
In addition, in a pneumatic table whose upper surface is made of a porous material such as ceramics, since the ventilation resistance is large and the flow rate of the ejected air is small, although the air turbulence in the clean room is suppressed, the floating amount is greater than the above. small problem

Method used

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  • Air table for conveying sheet material and conveyer with the same
  • Air table for conveying sheet material and conveyer with the same
  • Air table for conveying sheet material and conveyer with the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0066] The sheet-shaped material conveying apparatus 10 is constructed as in the first embodiment described above, and the glass substrate 12 is conveyed in the clean room. The specific conditions are as follows.

[0067] Dimensions of the glass substrate 12: W1500mm×L1800mm×t0.7mm

[0068] The flow velocity of the downdraft in the clean room: about 500mm / sec

[0069] External dimensions of the pneumatic table 14 for conveying sheet-shaped materials: W300mm×L700mm×H40mm

[0070] Divided grid size of the second frame 36 and the third frame 38: 90mm×25mm

[0071] The number of divided grids of the second frame 36 and the third frame 38: 3 columns×23 rows

[0072] The size and spacing of the middle air hole 26: φ3.5×P15mm

[0073] Opening area ratio of the partition wall portion 28: 4.2%

[0074] The material of the uniform opening part 50 of the airflow uniform distribution attenuator 30: metal mesh

[0075] Air flow uniform distribution Attenuator 30 opening area ratio: 3...

Embodiment 2

[0081] The sheet-shaped material conveying apparatus 10 is constructed as in the second embodiment described above, and the glass substrate 12 is conveyed in the clean room. The specific conditions are as follows.

[0082] Dimensions of the pneumatic table 60 for conveying thin plate materials: W300mm×L700mm×H50mm

[0083] Material of the partition portion 28: expanded alloy

[0084] Opening area ratio of the partition wall portion 28: 65%

[0085] Dimensions of airflow uniform distribution attenuator 64: W280mm×L680mm×H22mm

[0086] Material of sheet member 62A: aluminum sheet

[0087] Thickness of the thin plate member 62A x juxtaposition pitch: T0.11mm x P22mm

[0088] In addition, the size of the glass substrate 12 , the flow velocity of the downdraft in the clean room, the material of the upper surface portion 16 of the outer wall portion 20 , and the opening area ratio are the same as those of the first embodiment.

[0089] Under the above conditions, the floating a...

Embodiment 3

[0092] The sheet-shaped material conveying apparatus 10 is constructed as in the third embodiment described above, and the glass substrate 12 is conveyed in the clean room. The specific conditions are as follows.

[0093] Dimensions of the pneumatic table 60 for conveying thin plate materials: W300mm×L700mm×H50mm

[0094] Material of the partition portion 28: expanded alloy

[0095] Opening area ratio of the partition wall portion 28: 65%

[0096] The stacking height of the uniform opening part 72 of the air flow uniform distribution attenuator 74: 18mm

[0097] Filling rate of the uniform opening part 72 of the airflow uniform distribution attenuator 74: about 3% by weight

[0098] In addition, the material of the upper surface part 16 of the outer wall part 20, the opening area ratio, the size of the glass substrate 12, and the flow velocity of the downdraft of a clean room are the same as Example 1.

[0099] Under the above conditions, the floating amount in the vicinit...

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Abstract

Provided is an air table for conveying a thin material and a conveyance device for a thin material capable of obtaining large amount of levitation of the thin material while suppressing turbulence of air in a clean room and having high reliability. This air table (14) for conveying the thin material has: an external wall part (20) whose upper face part (16) is a substantially flat box-like body and in which a plurality of air feeding holes (18) for supplying air to a lower face of a glass substrate (12) are formed in the upper face part (16); a bulkhead part (28) provided in the external wall part (20) so as to separate an inner side of the external wall part (20) from a lower side chamber (22) for introducing air into the external wall part (20) and an upper side chamber (24) adjacent to the air feeding holes (18) and forming a plurality of intermediate vent holes (26) passing through in the vertical direction; and an air stream uniformly distributing damper (30) provided in the upper side chamber (24) to achieve uniform distribution of air stream from the intermediate vent holes (26) into the air feeding holes 18 and damp velocity of air stream.

Description

technical field [0001] The present invention relates to a pneumatic table for conveying a sheet-like material that supports a sheet-like material such as a liquid crystal display (LCD), plasma display, and a sheet-like material conveying device including the air table without contact. (PDP) and other large thin glass substrates for flat panel displays (FPD). Background technique [0002] For glass substrates of flat-panel displays such as liquid crystal displays and plasma displays, a little damage or dust will greatly affect its quality. The surface is conveyed smoothly so that no damage occurs on the surface of the glass substrate and foreign matter does not adhere. [0003] On the other hand, in liquid crystal displays, the size of the glass substrate is increasing day by day. For example, in the 8th generation, the thickness is about 0.5 to 0.7mm relative to the size of W2200mm×L2500mm, which is very thin. When the base plate is used, if only its peripheral end is supp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G49/06B65G37/00B65G51/03
CPCB65G47/91B65G49/063B65G49/065B65G2249/02G02F1/13H01L21/67706
Inventor 名仓成之滨中亮明弓场说治鸟山典之小栗勤牧野勉福田丈二
Owner NIPPON SEKKEI INDS
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