Air table for conveying sheet material and conveyer with the same

Abstract

Provided is an air table for conveying a thin material and a conveyance device for a thin material capable of obtaining large amount of levitation of the thin material while suppressing turbulence of air in a clean room and having high reliability. This air table (14) for conveying the thin material has: an external wall part (20) whose upper face part (16) is a substantially flat box-like body and in which a plurality of air feeding holes (18) for supplying air to a lower face of a glass substrate (12) are formed in the upper face part (16); a bulkhead part (28) provided in the external wall part (20) so as to separate an inner side of the external wall part (20) from a lower side chamber (22) for introducing air into the external wall part (20) and an upper side chamber (24) adjacent to the air feeding holes (18) and forming a plurality of intermediate vent holes (26) passing through in the vertical direction; and an air stream uniformly distributing damper (30) provided in the upper side chamber (24) to achieve uniform distribution of air stream from the intermediate vent holes (26) into the air feeding holes 18 and damp velocity of air stream.

Description

technical field [0001] The present invention relates to a pneumatic table for conveying a sheet-like material that supports a sheet-like material such as a liquid crystal display (LCD), plasma display, and a sheet-like material conveying device including the air table without contact. (PDP) and other large thin glass substrates for flat panel displays (FPD). Background technique [0002] For glass substrates of flat-panel displays such as liquid crystal displays and plasma displays, a little damage or dust will greatly affect its quality. The surface is conveyed smoothly so that no damage occurs on the surface of the glass substrate and foreign matter does not adhere. [0003] On the other hand, in liquid crystal displays, the size of the glass substrate is increasing day by day. For example, in the 8th generation, the thickness is about 0.5 to 0.7mm relative to the size of W2200mm×L2500mm, which is very thin. When the base plate is used, if only its peripheral end is supp...

AI Technical Summary

Problems solved by technology

In addition, due to such air turbulence, foreign matter such as dust may easily adhere to the glass substrate.

In addition, in a pneumatic table whose upper surface is made of a porous material such as ceramics, since the ventilation resistance is large and the flow rate of the ejected air is small, although the air turbulence in the clean room is suppressed, the floating amount is greater than the above. small problem

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