Method of recycling a delaminated wafer and a silicon wafer used for the recycling

Abstract

There is disclosed a method of recycling a delaminated wafer produced as a by-product in producing an SOI wafer according to a hydrogen ion delaminating method by reprocessing it for reuse as a silicon wafer, wherein at least polishing of the delaminated wafer for removing of a step in the peripheral part of the delaminated wafer and heat treatment in a reducing atmosphere containing hydrogen are conducted as the reprocessing. There are provided a method of appropriately reprocessing a delaminated wafer produced as a by-product in a hydrogen ion delaminating method to reuse it as a silicon wafer actually, and particularly, a method of reprocessing an expensive wafer such as an epitaxial wafer many times for reuse, to improve productivity of SOI wafer having a high quality SOI layer, and to reduce producing cost.

Description

[0001] 1. Field of the Invention[0002] The present invention relates to a method of recycling a silicon wafer by reprocessing a delaminated (split) wafer produced as a by-product in a hydrogen ion delaminating method (also called a smart cut method) wherein an ion-implanted wafer is bonded to another wafer and a portion of the ion-implanted wafer is delaminated to thereby obtain an SOI (silicon on insulator) wafer. Particularly, the present invention relates to a method of reprocessing the delaminated wafer many times, and reusing it many times.[0003] 2. Description of the Related Art[0004] Conventionally, two methods have gained wide notice as methods of fabricating wafers having an SOI structure. One method is a SIMOX (separation by implanted oxygen) method in which oxygen ions are implanted into a silicon monocrystal at a high concentration, and heat treatment is then performed at a high temperature in order to form an oxide layer. The other method is a bonding method in which tw...

AI Technical Summary

Benefits of technology

[0020] As described above, it has been found that there is a step in the peripheral part of the delaminated wafer produced as a by-product. According to the method of the present invention, the step in the peripheral part of the delaminated wafer is removed by polishing as reprocessing. With polishing for removal of the step in the peripheral part of the delaminated wafer, the peripheral step can be easily removed, and moreover, the damage layer on the surface of the delaminated wafer can also be removed, and the surface roughness can also be improved at the same time.

[0042] As described above, when the delaminated wafer produced as a by-product in the hydrogen ion delaminating method is reprocessed appropriately according to the present invention, it can be actually reused as a silicon wafer. Particularly, the stock removal of the delaminated wafer can be decreased, an expensive wafer such as an epitaxial wafer can be reprocessed many times to be reused many times. Thereby, improvement in productivity of the SOI wafer having the SOI layer of high quality and cost reduction can be achieved.

Problems solved by technology

However, the SIMOX method has many problems in relation to the reliability of a buried oxide layer, the crystallinity of the SOI layer, necessity of heat treatment at a temperature of 1300.degree. C. or higher, and the like.

However, since the thin film is formed by means of mechanical machining, it takes long time to form the thin film, and a great portion of one of the wafers is pulverized to be lost.

Therefore, productivity is extremely low, and production cost is significantly high.

Furthermore, there are limits to the thickness and thickness uniformity of the resultant SOI layer in formation of the thin film by grinding and polishing by means of mechanical machining.

However, it has been found in recent years that there exist in the CZ wafer crystal defects called COP (Crystal Originated Particle) which are incorporated while the crystal is growing.

However, since it is necessary to use an expensive epitaxial wafer, production cost of the SOI wafer gets far higher.

However, since only one SOI wafer can be obtained from two silicon wafers, there still exists the problem of high production cost.

It is conceptually possible to reuse the delaminated wafer, but there has been no actual cases of reusing the delaminated wafer, and the specific means for reusing it has not yet been known.

However, in order to improve the surface properties by grinding and polishing, long processing time and a lot of stock removal are required.

Moreover, in the case that an epitaxial layer is used as a bond wafer in the hydrogen ion delimitation method, and SOI layer is made of an epitaxial layer, since the epitaxial layer remaining on the delaminated layer is completely removed, the epitaxial layer cannot be reused as a SOI layer.

Accordingly, cost for fabrication of SOI wafer cannot be reduced.

In the case that CZ wafer is used as a bond wafer, the problems in relation to the above-mentioned COP cannot be solved by grinding and polishing.

In the case that FZ wafer is used as a bond wafer, a lot of stock removal in grinding or polishing means the small number of times of reuse, and further, long processing time, and high production cost.

Furthermore, since the oxide film and the silicon are different in hardness, uniform polishing is difficult in the presence of the oxide film.

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