Designer particles of micron and submicron dimension

Abstract

Micron-sized particles are produced in quantity by one of various methods, including generally the steps of preparing a substrate surface through a lithographic process, the surface being characterized by defining a plurality of elements, depositing a layer of particle material on the substrate surface including the elements, processing the substrate surface to isolate the material deposited on the elements, and separating the particles from the elements. The size and shape of the elements predetermine the size and shape of the particles. The elements may comprise, inter alia, pillars of photoresist or spaces on the substrate surrounded and defined by photoresist.

Description

BACKGROUND AND SUMMARY[0001] Small particles, i.e. particles approaching one micron or less, are known in the art. These particles are made with various techniques and may be comprised of widely varying materials. For example, particles may be made of gold from colloidal gold solutions, tungsten from a process involving grinding, sifting, and filtering, and still other lesser used materials such as stainless steel, frozen water, and plastic spheres. There are still other similarly sized particles made from other materials as well. However, all of these particles produced by these various methods share certain characteristics. For example, the inventor is unaware of any particles, or process for producing particles, which have a uniform size and shape regardless of whether there is an opportunity to choose a particular shape. For example, many processes produce particles which are essentially globular, but those globular shapes vary from particle to particle and also with respect to ...

AI Technical Summary

Problems solved by technology

In other words, there is not a consistent number of particles of each particle size contained within a harvest of any particular process.

Furthermore, some particle materials and processes are not capable of being produced in all sizes.

Still another limitation in the prior art is that the kinds of materials which may be utilized are process dependent.

In other words, certain types of metal may not be used to produce particles through the colloidal solution process due to the chemistry.

Still other new uses may be considered and are limited solely by the ingenuity of the scientist or engineer.

Other particle shapes and sizes may be utilized and are limited only by the imagination of the designer and the physical limitations of the processes used to prepare and coat the substrate.

Items such as cost of the mask production and the time dictated this step.

High temperature treatment in an ammonia environment was used to neutralize the carboxylic acid in the exposed areas of photoresist, thus making them poorly soluble and non-photosensitive.

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